DETECTION DEVICE, MOVABLE BODY APPARATUS, PATTERN FORMATION APPARATUS AND PATTERN FORMATION METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

• US 20090004580A1
• Filed: 05/28/2008
• Published: 01/01/2009
• Est. Priority Date: 05/30/2007
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Kanaya, Yuho
• Granted Patent: US 8,098,362 B2
• Time in Patent Office: Days
• US Class Current: 430/22
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position
• CPC Class Codes: G03F 7/7085 Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
• CPC Class Codes: G03F 7/70916 Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
• CPC Class Codes: G03F 7/70925 Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning

Abstract

By irradiating a detection beam from an irradiation system of a detection device to a scale used for measuring the position of a wafer stage, and detecting the detection beam via the scale by a photodetection system, a surface state (an existence state of foreign substance) of the scale is detected. With this operation, detection of the surface state can be performed contactlessly with respect to the scale. Moreover, movement control of the wafer stage can be performed with high precision by taking the surface state into consideration.

Claims

1. An exposure apparatus that exposes an object held by a movable body with an energy beam, the apparatus comprising:

an encoder system of which one of a measurement member and a head member is arranged on the movable body and the other of the members is arranged facing the movable body, and which measures positional information of the movable body using a plurality of heads of the head member that f aces the measurement member; and

a detection device that detects information on a surface state of the measurement member.

2. The exposure apparatus according to claim 1, further comprising:

a controller that controls a position of the movable body based on the measured positional information and also decides a plurality of heads to be used for the measurement based on a result of the detection.

3. The exposure apparatus according to claim 2 wherein

the controller switches at least one of the plurality of heads used for the measurement to another head during movement of the movable body.

4. The exposure apparatus according to claim 1, wherein

a detection operation with respect to the measurement member by the detection device is at least partially carried out in parallel with another operation.

5. The exposure apparatus according to claim 4, wherein

the another operation includes at least one of an exposure operation, an alignment operation and a movement operation of the object.

6. The exposure apparatus according to claim 1, wherein

the result of the detection includes information on a foreign substance on the measurement member, and

the exposure apparatus further comprises

a foreign substance removal device that removes a foreign substance on the measurement member.

7. The exposure apparatus according to claim 1, further comprising:

an optical member that emits the energy beam; and

a liquid immersion system that forms a liquid immersion area between the optical member and the object.

8. The exposure apparatus according to claim 7, wherein

the measurement member is arranged on the movable body and a surface of the measurement member comes into contact with the liquid immersion area by movement of the movable body.

9. The exposure apparatus according to claim 1, wherein

the measurement member is arranged above the movable body and the detection device is arranged capable of moving relative to the measurement member.

10. The exposure apparatus according to claim 1, wherein

the encoder system irradiates a measurement beam to a grating surface of the measurement member and measures positional information of the movable body within a predetermined plane.

11. The exposure apparatus according to claim 10, wherein

the measurement member has the grating surface that is different from the surface.

12. An exposure method of exposing an object held by a movable body with an energy beam, the method comprising:

a measurement process of measuring positional information of the movable body, using an encoder system of which one of a measurement member and a head member is arranged on the movable body and the other of the members is arranged facing the movable body, and which measures the positional information using a plurality of heads of the head member that faces the measurement member; and

a detection process of detecting information on a surface state of the measurement member using a detection device.

13. The exposure method according to claim 12, further comprising:

a control process of controlling a position of the movable body based on the measured positional information and also deciding a plurality of heads to be used for the measurement based on a result of the detection.

14. The exposure method according to claim 13, wherein

in the control process, at least one of the plurality of heads used for the measurement is switched to another head during movement of the movable body.

15. The exposure method according to claim 12, wherein

a detection operation with respect to the measurement member by the detection device is at least partially carried out in parallel with another operation.

16. The exposure method according to claim 15, wherein

the another operation includes at least one of an exposure operation, an alignment operation and a movement operation of the object.

17. The exposure apparatus according to claim 12, wherein

the result of the detection includes information on a foreign substance on the measurement member, and

the exposure method further comprises

a foreign substance removal process of removing a foreign substance on the measurement member in accordance with the result of the detection.

18. The exposure method according to claim 12, wherein

exposure of the object is performed in a State where a liquid immersion area is formed between an optical member that emits the energy beam and the object.

19. The exposure method according to claim 18, wherein

the measurement member is arranged on the movable body and a surface of the measurement member comes into contact with the liquid immersion area by movement of the movable body.

20. The exposure method according to claim 12, wherein

the measurement member is arranged above the movable body and the detection device is arranged capable of moving relative to the measurement member.

21. The exposure method according to claim 12, wherein

the encoder system irradiates a measurement beam to a grating surface of the measurement member and measures positional information of the movable body within a predetermined plane.

22. The exposure method according to claim 21, wherein

the measurement member has the grating surface that is different from the surface.

23. A detection device that detects a surface state of a measurement member which is arranged on a movable body and to which a measurement beam used for measurement of positional information of the movable body in a predetermined direction is irradiated, the detection device comprising:

an irradiation system that irradiates a light beam to the measurement member; and

a detection system that detects the light beam via the measurement member.

24. The detection device according to claim 23, wherein

the measurement member is configured of a grating member that has a grating having a periodic direction in the predetermined direction, and

the detection system detects a surface state of the grating member by detecting the light beam.

25. The detection device according to claim 24, wherein

the irradiation system irradiates the light beam substantially parallel to the grating member.

26. The detection device according to claim 24, wherein

the irradiation system irradiates the light beam and forms a band-shaped irradiation area that is elongated in a direction intersecting the predetermined direction on the grating member.

27. The detection device according to claim 26, wherein

the detection system detects a coordinate of an irradiation position on the grating member of the light beam received by the detection system.

28. The detection device according to claim 24, wherein

the surface state of the grating member includes whether or not a foreign substance exists on a surface of the grating member.

29. The detection device according to claim 23, wherein

the irradiation system irradiates the light beam substantially parallel to a surface of the measurement member.

30. The detection device according to claim 23, wherein

the irradiation system irradiates the light beam and forms a band-shaped irradiation area that is elongated in a direction intersecting the predetermined direction on the measurement member.

31. The detection device according to claim 23, wherein

the surface state of the measurement member includes whether or not a foreign substance exists on a surface of the measurement member.

32. A movable body apparatus, comprising:

a movable body on which a measurement member is arranged;

a measurement device that has a head facing the measurement member and measures positional information of the movable body in the predetermined direction by the head; and

the detection device according to claim 23 that detects a surface state of the measurement member.

33. A pattern formation apparatus, comprising:

the movable body apparatus according to claim 32 in which the movable body holds an object; and

a pattern generation device that generates a pattern on the object.

34. The pattern formation apparatus according to claim 33, wherein

the detection device has a plurality of irradiation areas of the light beam, and

at least one of the plurality of irradiation areas is placed at a position where detection of a surface state of the measurement member can be performed, while the movable body is performing an operation including movement for pattern formation on the object.

35. The pattern formation apparatus according to claim 33, wherein

the detection device has a plurality of irradiation areas of the light beam, and

at least one of the plurality of irradiation areas is placed at a position where detection of a surface state of the measurement member can be performed, while the movable body is performing an operation including movement for detection of a mark placed on the object.

36. The pattern formation apparatus according to claim 33, wherein

the detection device has a plurality of irradiation areas of the light beam, and

at least one of the plurality of irradiation areas is placed at a position where detection of a surface state of the measurement member can be performed, while the movable body is performing an operation including movement from a position where an object is unloaded from the movable body to a position where an object is loaded to the movable body.

37. The pattern formation apparatus according to claim 33, wherein

the surface state of the measurement member includes whether or not a foreign substance exists on a surface of the measurement member.

38. The pattern formation apparatus according to claim 37, further comprising:

a foreign substance removal device that removes a foreign substance existing on the surface of the measurement member based on a detection result of the detection device.

39. The pattern formation apparatus according to claim 38, wherein

the pattern generation device has an optical member that is placed facing the object and emits an energy beam, and a liquid immersion system that fills a space between the optical member and the object with a liquid and forms a liquid immersion area, and

the foreign substance removal device includes the liquid immersion system.

40. The pattern formation apparatus according to claim 39, wherein

the liquid immersion system uses a liquid that is different from the liquid that forms the liquid immersion area, when removing the foreign substance.

41. The pattern formation apparatus according to claim 33, further comprising:

a warning device that issues a warning in accordance with a detection result of the detection device.

42. The pattern formation apparatus according to claim 33, further comprising:

another movable body that is different from the movable body, wherein

the detection device also detects a surface state of a measurement member arranged on the another movable body.

43. The pattern formation apparatus according to claim 33, wherein

a surface of the movable body on a side of holding the object and the surface of the measurement member are set flush with a surface of the object held by the movable body.

44. The pattern formation apparatus according to claim 33, wherein

the pattern generation device exposes an object with an energy beam and forms a pattern on the object.

45. An exposure apparatus that exposes an object with an energy beam and forms a pattern on the object, the apparatus comprising:

the movable body apparatus according to claim 32 in which the movable body holds the object.

46. The exposure apparatus according to claim 45, wherein

a surface of the movable body on a side of holding the object and a surface of the measurement member are set flush with a surface of the object held by the movable body.

47. The exposure apparatus according to claim 45, further comprising:

an optical member that is placed facing the object; and

a liquid immersion system that fills a space between the optical member and the object with a liquid and forms a liquid immersion area, wherein

the liquid immersion area passes on the measurement member during movement of the movable body.

48. A movable body apparatus, comprising:

a movable body on which a measurement member is arranged;

a measurement device that has a head that irradiates a measurement beam to the measurement member when facing the measurement member and receives the measurement beam via the measurement member, and measures positional information of the movable body in a predetermined direction by the head; and

a detection device that detects a surface state of the measurement member.

49. The movable body apparatus according to claim 48, wherein

the measurement member is configured of a grating member that has a grating having a periodic direction in the predetermined direction, and

the detection device detects a surface state of the grating member.

50. The movable body apparatus according to claim 49, wherein

the grating member has a first plate-shaped member on which the grating is formed and a second plate-shaped member that is attached to the first plate-shaped member in a state of covering the grating section on the first plate-shaped member.

51. The movable body apparatus according to claim 49, wherein

on the movable body, a grating member on which a first grating is formed with a direction parallel to a first axis serving as the predetermined direction and a grating member on which a second grating is formed with a direction parallel to a second axis that intersects the first axis serving as the predetermined direction are arranged, and

the measurement device includes a first axis encoder that has a plurality of first heads whose positions are different in a direction intersecting the direction parallel to the first axis and measures positional information of the movable body in the direction parallel to the first axis by the first head facing the first grating, and a second axis encoder that has a plurality of second heads whose positions are different in a direction intersecting the direction parallel to the second axis and measures positional information of the movable body in the direction parallel to the second axis by the second head facing the second grating.

52. The movable body apparatus according to claim 51, wherein

the detection device has an irradiation area of the light beam used to detect a surface state of the grating member on which the first grating is formed, and an irradiation area of the light beam used to detect a surface state of the grating member on which the second grating is formed.

53. The movable body apparatus according to claim 49, wherein

the detection device has

an irradiation system that irradiates a light beam to the grating member, and

a detection system that detects the light beam via the grating member.

54. The movable body apparatus according to claim 53, wherein

the irradiation system irradiates the light beam substantially parallel to a surface of the grating member.

55. The movable body apparatus according to claim 53, wherein

the irradiation system irradiates the light beam and forms a band-shaped irradiation area that is elongated in a direction intersecting the predetermined direction on the grating member.

56. The movable body apparatus according to claim 55, wherein

the detection system detects a coordinate of an irradiation position on the grating member of the light beam received by the detection system.

57. The movable body apparatus according to claim 55, further comprising:

a controller that changes a relative position in the predetermined direction of the irradiation area and the grating member, in parallel with detection by the detection device.

58. The movable body apparatus according claim 57, wherein

the controller performs the change of the relative position by movement of the movable body.

59. A pattern formation apparatus, comprising:

the movable body apparatus according to claim 49 in which the movable body holds an object, and

a pattern generation device that generates a pattern on the object.

60. The pattern formation apparatus according to claim 59, wherein

the detection device has a plurality of irradiation areas of the light beam, and

at least one of the plurality of irradiation areas is placed at a position where detection of a surface state of the grating member can be performed, while the movable body is performing an operation including movement for pattern formation on the object.

61. The pattern formation apparatus according to claim 59, wherein

the detection device has a plurality of irradiation areas of the light beam, and

at least one of the plurality of irradiation areas is placed at a position where detection of a surface state of the grating member can be performed, while the movable body is performing an operation including movement for detection of a mark placed on the object.

62. The pattern formation apparatus according to claim 59, wherein

the detection device has a plurality of irradiation areas of the light beam, and

at least one of the plurality of irradiation areas is placed at a position where detection of a surface state of the grating member can be performed, while the movable body is performing an operation including movement from a position where an object is unloaded from the movable body to a position where an object is loaded to the movable body.

63. The pattern formation apparatus according to claim 59, wherein

the surface state of the grating member includes whether or not a foreign substance exists on a surface of the grating member.

64. The pattern formation apparatus according to claim 63, further comprising:

a foreign substance removal device that removes a foreign substance existing on the surface of the grating member based on a detection result of the detection device.

65. The pattern formation apparatus according to claim 64, wherein

the pattern generation device has an optical member that is placed facing the object and emits an energy beam, and a liquid immersion system that fills a space between the optical member and the object with a liquid and forms a liquid immersion area, and

the foreign substance removal device includes the liquid immersion system.

66. The pattern formation apparatus according to claim 65, wherein

the liquid immersion system uses a liquid that is different from the liquid that forms the liquid immersion area, when removing the foreign substance.

67. The pattern formation apparatus according to claim 59, further comprising:

a selection device that judges whether to perform cleaning of the grating member or to continue a series of operations by the movable body for pattern formation on the object based on a detection result of the detection device, and in the case where the series of operations is continued, selects a head of the measurement device avoiding a foreign substance so that a head that faces the foreign substance is not used during the series of operations.

68. The pattern formation apparatus according to claim 59, further comprising:

a warning device that issues a warning in accordance with a detection result of the detection device.

69. The pattern formation apparatus according to claim 59, further comprising:

another movable body that is different from the movable body, wherein

the detection device also detects a surface state of a grating member arranged on the another movable body.

70. The pattern formation apparatus according to claim 59, wherein

a surface of the movable body on a side of holding the object and the surface of the grating member are set flush with a surface of the object held by the movable body.

71. The pattern formation apparatus according to claim 59, wherein

the pattern generation device exposes an object with an energy beam and forms a pattern on the object.

72. An exposure apparatus that exposes an object with an energy beam and forms a pattern on the object, the apparatus comprising:

the movable body apparatus according to claim 49 in which the movable body holds the object.

73. The exposure apparatus according to claim 72, wherein

a surface of the movable body on a side of holding the object and a surface of the grating member are set flush with a surface of the object held by the movable body.

74. The exposure apparatus according to claim 72, further comprising:

an optical member that is placed facing the object; and

a liquid immersion system that fills a space between the optical member and the object with a liquid and forms a liquid immersion area, wherein

the liquid immersion area passes on the grating member during movement of the movable body.

75. A movable body apparatus, comprising:

a movable body that moves within a predetermined plane, holding an object mounted on the movable body;

a measurement device that has a head that faces one surface of the movable body on which the object is mounted and which is parallel to the plane, and measures positional information of the movable body in a predetermined direction by the head irradiating a measurement beam to an area other than a mounting area of the object on the one surface of the movable body; and

a detection device that detects a surface state of the area other than the mounting area of the object on the one surface of the movable body.

76. A pattern formation apparatus, comprising:

the movable body apparatus according to claim 75; and

a pattern generation device that generates a pattern on an object mounted on the movable body.

77. The pattern formation apparatus according to claim 76, wherein

the pattern generation device forms a pattern on the object by irradiating an energy beam and exposing the object.

78. A pattern formation method, comprising:

a pattern formation process of forming a pattern on an object held by a movable body; and

a detection process of detecting a surface state of a measurement member which is arranged on the movable body and to which a measurement beam used for measurement of positional information of the movable body in a predetermined direction is irradiated.

79. The pattern formation method according to claim 78, wherein

in the detection process, a surface state of a grating member on which a grating having a periodic direction in the predetermined direction is formed is detected.

80. The pattern formation method according to claim 79, wherein

in the detection process, a light beam is irradiated to a surface of the grating member and the light beam via the surface of the grating member is detected.

81. The pattern formation method according to claim 80, wherein

in the detection process, the light beam is irradiated substantially parallel to the surface of the grating member.

82. The pattern formation method according to claim 79, wherein

in the pattern formation process, a position of the movable body is detected using the grating of the grating member.

83. The pattern formation method according to claim 79, wherein

at least part of processing of the detection process is performed in parallel with processing of the pattern formation process.

84. The pattern formation method according to claim 79, further comprising:

a mark detection process of detecting a mark placed on the object, prior to the pattern formation process, wherein

at least part of processing of the detection process is performed in parallel with processing of the mark detection process.

85. The pattern formation method according to claim 79, further comprising:

an unload process of unloading an object held by the movable body; and

a load process of loading an object to the movable body, wherein

at least part of processing of the detection process is performed during transition from the unload process to the load process.

86. The pattern formation method according to claim 79, wherein

the surface state of the grating member includes whether or not a foreign substance exists on a surface of the grating member, and

the pattern formation method further comprises

a foreign substance removal process of removing a foreign substance on the surface of the grating member in accordance with a detection result of the detection process.

87. The pattern formation method according to claim 79, further comprising:

a warning process of issuing a warning in accordance with a detection result of the detection process.

88. A device manufacturing method, comprising:

a process of forming a pattern on an object by the pattern formation method according to claim 79; and

a process of applying processing to the object on which the pattern is formed.

89. A pattern formation method, comprising:

a pattern formation process of forming a pattern on an object held by a movable body; and

a foreign substance removal process of removing a foreign substance existing on a surface of the measurement member which is arranged on the movable body and to which a measurement beam used for measurement of positional information of the movable body in a predetermined direction is irradiated.

90. The pattern formation method according to claim 89, wherein

the measurement member is a grating member on which a grating having a periodic direction in a predetermined direction is formed, and

in the foreign substance removal process, a foreign substance existing on a surface of the grating member is removed.

91. The pattern formation method according to claim 89, wherein

in the pattern formation process, an energy beam is irradiated to the object via an optical member placed facing the object and a liquid filled in a space between the optical member and the object by a liquid immersion system, and in the foreign substance removal process, a foreign substance existing on the surface of the measurement member is removed by the liquid of the liquid immersion system.

92. The pattern formation method according to claim 89, further comprising:

a detection process of detecting a foreign substance on the surface of the measurement member prior to the foreign substance removal process.

93. The pattern formation method according to claim 92, wherein

in the detection process, a light beam is irradiated to the measurement member and the light beam via the measurement member is detected.

94. A device manufacturing method, comprising:

a process of forming a pattern on an object by the pattern formation method according to claim 89; and

a process of applying processing to the object on which the pattern is formed.