RADIATION DETECTING APPARATUS, RADIATION IMAGING APPARATUS AND RADIATION IMAGING SYSTEM
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Abstract
A radiation detecting apparatus according to the present invention includes: pixels including switching elements arranged on an insulating substrate and conversion elements arranged on the switching elements to convert a radiation into electric carriers, the switching elements and the conversion elements are connected with each other, the pixels two-dimensionally arranged on the insulating substrate in a matrix; gate wiring commonly connected with a plurality of switching elements arranged in a row direction on the insulating substrate; signal wiring commonly connected with a plurality of switching elements arranged in a column direction; and a plurality of insulating films arranged between the switching elements and the conversion elements, wherein at least one of the gate wiring and the signal wiring is arranged to be put between the plurality of insulating films.
12 Citations
10 Claims
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1. (canceled)
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2. A manufacturing method of a radiation detecting apparatus, comprising the steps of:
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forming a plurality of switching elements arranged two-dimensionally on an insulating substrate, and each having first and second electrodes and a gate electrode; forming a first insulating film covering the plurality of switching elements; forming a through-hole in the first insulating film; forming, on the first insulating film having the through-hole, a signal wiring for connecting each of the switching elements arranged along a first direction and a gate wiring for connecting each of the switching elements arranged along a second direction; forming a second insulating film covering the first insulating film and also covering either the signal wiring or the gate wiring; and forming a plurality of conversion elements each connected electrically correspondingly to a respective one of the switching elements, after formation of the second insulating film. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10)
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Specification