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TUNING-FORK-TYPE BIMORPH PIEZOELECTRIC VIBRATOR, VIBRATING GYROSCOPE MODULE INCLUDING THE VIBRATOR, AND METHOD FOR MANUFACTURING THE TUNING-FORK-TYPE BIMORPH PIEZOELECTRIC VIBRATOR

  • US 20090007665A1
  • Filed: 09/18/2008
  • Published: 01/08/2009
  • Est. Priority Date: 04/26/2006
  • Status: Active Grant
First Claim
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1. A tuning-fork-type bimorph piezoelectric vibrator comprising:

  • at least two piezoelectric bodies having opposite polarization directions and being bonded together to define a tuning fork structure;

    driving/detecting electrodes provided on a first principal surface defined by a surface of one of the at least two piezoelectric bodies;

    an intermediate metal layer disposed between bonding surfaces of the at least two piezoelectric bodies;

    wherein no metal layer is provided on a second principal surface defined by a surface of the other of the at least two piezoelectric bodies bonded together.

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