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WIRELESS PRESSURE SENSOR AND METHOD FOR FABRICATING WIRELESS PRESSURE SENSOR FOR INTEGRATION WITH AN IMPLANTABLE DEVICE

  • US 20090007679A1
  • Filed: 07/02/2008
  • Published: 01/08/2009
  • Est. Priority Date: 07/03/2007
  • Status: Active Grant
First Claim
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1. A method for fabricating a wireless pressure sensor, the method comprising:

  • providing a first substrate;

    controllably displacing a portion of the first substrate to form a cavity;

    patterning a conducting material on the first substrate to form a first capacitor plate and a first inductor;

    providing a second substrate;

    patterning a conducting material on the second substrate to form a second capacitor plate;

    attaching the second substrate to the first substrate to seal the cavity such that at least a portion of the second substrate is movable with respect to the first substrate within the cavity in response to a change in an external condition.

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