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Apparatus for Measuring a Mechanical Quantity

  • US 20090007686A1
  • Filed: 09/15/2008
  • Published: 01/08/2009
  • Est. Priority Date: 06/17/2004
  • Status: Active Grant
First Claim
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1. A mechanical quantity measuring apparatus having a strain detector formed on a single crystal semiconductor substrate for detecting a strain, and bonded to or buried in an object to be measured to measure a strain, wherein:

  • a ratio t/L1 is 0.3 or smaller where t is a thickness of said semiconductor substrate and L1 is a length of said semiconductor substrate along a strain detection direction of said strain detector.

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