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In-Line Gas Purity Monitoring and Control System

  • US 20090007777A1
  • Filed: 09/19/2008
  • Published: 01/08/2009
  • Est. Priority Date: 02/04/2005
  • Status: Active Grant
First Claim
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1. A method for supplying a high purity gas product comprising(a) providing a first gas stream comprising a major component and at least one impurity component;

  • (b) determining the concentration of the at least one impurity component and comparing the concentration so determined with a reference concentration for that component;

    (c) when the value of the concentration so determined is less than or equal to the reference concentration, utilizing the first gas stream to provide the high purity gas product; and

    (d) when the value of the concentration so determined is greater than the reference concentration,(1) providing a second gas stream comprising the major component, wherein the second gas stream is provided by dividing the first gas stream into a first substream and a second substream, removing at least a portion of the at least one impurity component in the first substream to provide a purified substream, and mixing the purified substream with the second substream to provide the high purity gas product; and

    (2) mixing the first gas stream with the second gas stream to yield a mixed gas stream having a concentration of the at least one impurity component that is less than the reference concentration, and utilizing the mixed gas stream to provide the high purity gas product.

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