Inspection Apparatus Using Terahertz Wave

• US 20090009190A1
• Filed: 03/22/2006
• Published: 01/08/2009
• Est. Priority Date: 03/24/2005
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Itsuji, Takeaki
• Granted Patent: US 7,633,299 B2
• Time in Patent Office: Days
• US Class Current: 324/639
• CPC Class Codes: G01N 21/3581 using far infrared light; using Terahertz radiation

Abstract

There is provided an inspection apparatus having a configuration which can suppress attenuation of an electromagnetic wave caused by an environment surrounding the inspection apparatus and can readily prevent an unwanted substance from being contaminated into a propagation path of the electromagnetic wave.

The inspection apparatus 100 includes a substrate 103 having therein a structure for holding an inspected object 104, an electromagnetic wave transmitting portion 101 having an antenna structure, and an electromagnetic wave receiving portion 102 having an antenna structure. The electromagnetic wave transmitting portion 101 and the electromagnetic wave receiving portion 102 are disposed in contact with the substrate 103.

Claims

1. An inspection apparatus comprising:

a substrate having integrated therein a structure for holding an inspected object;

an electromagnetic terahertz wave transmitting portion having an antenna structure for irradiating the inspected object with an electromagnetic terahertz wave; and

an electromagnetic terahertz wave receiving portion having an antenna structure for receiving the electromagnetic terahertz wave,

wherein the electromagnetic terahertz wave transmitting portion and the electromagnetic terahertz wave receiving portion are disposed in contact with the substrate.

2. The inspection apparatus according to claim 1, wherein an electromagnetic terahertz wave generated in the electromagnetic terahertz wave transmitting portion propagates through the substrate, and the electromagnetic terahertz wave receiving portion receives an electromagnetic terahertz wave which is changed when the inspected object is disposed in an electromagnetic wave propagation path.

3. The inspection apparatus according to claim 1, wherein the structure for holding the inspected object comprises a plurality of portions for holding the inspected object, periodically disposed to form a resonant structure.

4. The inspection apparatus according to claim 1, wherein at least one of the electromagnetic terahertz wave transmitting portion and the electromagnetic terahertz wave receiving portion comprises a negative resistance element.

5. The inspection apparatus according to claim 1, wherein at least one of the electromagnetic terahertz wave transmitting portion and the electromagnetic terahertz wave receiving portion is connected to a high frequency circuit via a waveguide, for allowing an electromagnetic terahertz wave to propagate therethrough.

6. The inspection apparatus according to claim 1, wherein each of the electromagnetic terahertz wave transmitting portion and the electromagnetic terahertz wave receiving portion has both a function of transmitting an electromagnetic terahertz wave and a function of receiving an electromagnetic terahertz wave.

8. The inspection apparatus according to claim 1, further comprising:

generation means for allowing the electromagnetic terahertz wave transmitting portion to generate an electromagnetic terahertz wave of a desired frequency band;

detection means for allowing the electromagnetic terahertz wave receiving portion to detect an electromagnetic terahertz wave propagated through the substrate;

a database for preliminarily storing physical characteristics of the inspected object; and

an analyzing portion for collating an information to an electromagnetic terahertz wave detected by the detection means with an information stored in the database to inspect the inspected object.

9. The inspection apparatus according to claim 8, wherein the generation means is a laser oscillator.

10. The inspection apparatus according to claim 1, wherein the electromagnetic terahertz wave transmitting portion and the electromagnetic terahertz wave receiving portion are formed along a direction perpendicular to a thickness direction of the substrate.

12. The inspection apparatus according to claim 1, wherein the structure extends from one end of the substrate to the other end of the substrate, parallel to the surface of the substrate.

13. The inspection apparatus according to claim 1, further comprising an inspected object insertion means for inserting the inspected object from outside into the structure.

14. The inspection apparatus according to claim 1, wherein the electromagnetic terahertz wave transmitting portion and the electromagnetic terahertz wave receiving portion are disposed to face each other with the substrate therebetween, and are in contact with the substrate.

7. (canceled)

11. (canceled)

15. An inspection apparatus comprising:

a substrate having integrated therein a structure for holding an inspected object;

an electromagnetic terahertz wave transmitting portion having an antenna structure for irradiating the inspected object with an electromagnetic terahertz wave;

an electromagnetic terahertz wave receiving portion having an antenna structure for receiving the electromagnetic terahertz wave; and

an inspected object insertion means for inserting the inspected object from outside the structure,

wherein the electromagnetic terahertz wave transmitting portion and the electromagnetic terahertz wave receiving portion are disposed to face each other with the substrate therebetween, and are in contact with the substrate.