PRESSURE SENSOR FOR MEASURING BLOOD PRESSURE AND METHOD OF FABRICATING THE SAME
First Claim
Patent Images
1. A pressure sensor for measuring blood pressure, comprising:
- at least one cantilever formed on an upper surface of a silicon substrate;
a piezoresistor formed on a fixed end of the cantilever; and
a metal wire and an electrode pad connected to both ends of the piezoresistor,wherein a stopper that limits a deformation of a free end of the cantilever is formed below the cantilever.
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Abstract
A pressure sensor includes at least one cantilever formed on an upper surface of a silicon substrate, a piezoresistor formed on a fixed end of the cantilever, and a metal wire and an electrode pad connected to both ends of the piezoresistor, wherein a stopper that limits a deformation of a free end of the cantilever is formed below the cantilever.
29 Citations
24 Claims
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1. A pressure sensor for measuring blood pressure, comprising:
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at least one cantilever formed on an upper surface of a silicon substrate; a piezoresistor formed on a fixed end of the cantilever; and a metal wire and an electrode pad connected to both ends of the piezoresistor, wherein a stopper that limits a deformation of a free end of the cantilever is formed below the cantilever. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A pressure sensor for measuring blood pressure, comprising:
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at least one beam formed on an upper surface of a silicon substrate, wherein both ends of the beam are supported by the silicon substrate; piezoresistors formed on both ends of the beam; and a wire and an electrode pad connected to both ends of each of the piezoresistors, wherein a stopper that limits a deformation of the beam is formed below the beam so as to be separated by a predetermined distance from a lower surface of the beam. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A method of fabricating a pressure sensor, comprising:
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(a) forming a piezoresistor on a fixed end of cantilever forming region on an upper surface of a silicon substrate; (b) forming a wire and an electrode pad connected to both ends of the piezoresistor; (c) forming an insulating layer on the silicon substrate that exposes a first region that defines the cantilever forming region; (d) etching the silicon substrate to a predetermined depth from a surface of the first region of the silicon substrate; (e) forming a wall protective film on a side wall of the etched first region; (f) forming a first wall where the wall protective film is not formed by dry etching the first region of the silicon substrate exposed through the wall protective film to a predetermined depth; and (g) forming a cantilever that is supported at one end by the silicon substrate and a stopper that limits a deformation of the cantilever by etching the first wall exposed through the wall protective film. - View Dependent Claims (16, 17, 18, 19, 24)
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20. A method of fabricating a pressure sensor, comprising:
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(a) forming piezoresistors on both ends of a beam forming region on an upper surface of a silicon substrate; (b) forming a wire and an electrode pad connected to both ends of each of the piezoresistors; (c) forming an insulating layer that exposes a first region that defines the beam forming region on the silicon substrate; (d) etching the silicon substrate to a predetermined depth from a surface of the first region of the silicon substrate; (e) forming a wall protective film on a side wall of the etched first region; (f) forming a first wall where the wall protective film is not formed by dry etching the first region of the silicon substrate exposed through the wall protective film to a predetermined depth; and (g) forming a beam that is supported at both ends by the silicon substrate and a stopper that limits a deformation of the beam by etching the first wall exposed through the wall protective film. - View Dependent Claims (21, 22, 23)
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Specification