Optical Multiwavelength Window Contamination Monitor for Optical Control Sensors and Systems
First Claim
1. A foreign-particle detection system for use with an optical instrument having a transmissive window with a first side and a second side, the system comprising:
- a radiation source to emit a radiation signal;
a diffusing reflector to diffusively spread the radiation signal emitted by the radiation source over the first side of the transmissive window;
a radiation detector to detect, at the second side of the transmissive window, the diffusively spread radiation signal transmitted by the transmissive window, and to generate a detected radiation signal based on the detected diffusively spread radiation signal; and
a computation module communicatively coupled to the radiation detector to detect a presence of foreign particles on at least one of the first side or the second side of the transmissive window based on at least the detected radiation signal.
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Accused Products
Abstract
A foreign-particle detection system for use with an optical instrument having a transmissive window with a first side and a second side includes a radiation source to emit a radiation signal, a diffusing reflector to diffusively spread the radiation signal emitted by the radiation source over the first side of the transmissive window, a radiation detector to detect, at the second side of the transmissive window, the diffusively spread radiation signal transmitted by the transmissive window, and to generate a detected radiation signal based on the detected diffusively spread radiation signal, and a computation module communicatively coupled to the radiation detector to detect a presence of foreign particles on at least one of the first side or the second side of the transmissive window based on at least the detected radiation signal.
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Citations
32 Claims
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1. A foreign-particle detection system for use with an optical instrument having a transmissive window with a first side and a second side, the system comprising:
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a radiation source to emit a radiation signal; a diffusing reflector to diffusively spread the radiation signal emitted by the radiation source over the first side of the transmissive window; a radiation detector to detect, at the second side of the transmissive window, the diffusively spread radiation signal transmitted by the transmissive window, and to generate a detected radiation signal based on the detected diffusively spread radiation signal; and a computation module communicatively coupled to the radiation detector to detect a presence of foreign particles on at least one of the first side or the second side of the transmissive window based on at least the detected radiation signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of automatically detecting foreign particles on at least one of a first surface or a second surface of a transmissive window of an optical instrument, comprising:
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directing a first beam of electromagnetic energy at a diffusing reflector;
wherein the diffusing reflector spreads impinging radiation over the first surface of the transmissive window to produce a diffused radiation signal;measuring the intensity of the diffused radiation signal on a side opposite to the first surface of the transmissive window; and detecting foreign particles on the at least one of the first surface or the second surface of the transmissive window based on the measured intensity of the diffused radiation signal. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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24. A foreign-particle detection system for use with an optical instrument having a transmissive window with a first side and a second side, the system comprising:
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a radiation source to generate a first electromagnetic radiation signal of a first wavelength and a second electromagnetic radiation signal of a second wavelength distinct from the first wavelength; a radiation detector to detect the first electromagnetic radiation signal propagated through the transmissive window, and the second electromagnetic radiation signal propagated through the transmissive window; and a controller communicatively coupled to the radiation detector to detect a presence of foreign particles on at least one of the first side or the second side of the transmissive window based on the intensity of the first electromagnetic radiation signal and on the intensity of the second electromagnetic radiation signal. - View Dependent Claims (25, 26, 27, 28)
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29. A method of detecting foreign particles on a surface of a transmissive window of an optical instrument, comprising:
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propagating a first radiation signal having a first wavelength through the transmissive window, wherein the first radiation signal impinges on a first side of the transmissive window; propagating a second radiation signal having a second wavelength through the transmissive window, wherein the second radiation signal impinges on the first side of the transmissive window; and
wherein the first radiation signal and the second radiation signal are not propagated simultaneously;obtaining a first measurement of radiation intensity corresponding to the first radiation signal exiting a second side of the transmissive window; obtaining a second measurement of radiation intensity corresponding to the second radiation signal exiting on the second side of the transmissive window; calculating the ratio between the first measurement and the second measurement to detect a presence of foreign particles on the first side or the second side of the transmissive window. - View Dependent Claims (30, 31)
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32. A foreign-particle detection system for use with an optical instrument having a transmissive window with a first side and a second side, the system comprising:
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a radiation source to successively generate a first electromagnetic radiation signal of a first wavelength and a second electromagnetic radiation signal of a second wavelength distinct from the first wavelength; a diffusing reflector to diffusively spread the first electromagnetic radiation signal and the second first electromagnetic radiation signal over the first side of the transmissive window; a radiation detector to detect, at the second side of the transmissive window, the first diffusively spread electromagnetic radiation signal and to generate a first detected radiation signal; and
to detect the second diffusively spread electromagnetic radiation signal and to generate a second detected radiation signal;a computation module communicatively coupled to the radiation detector to detect a presence of foreign particles on at least one of the first side or the second side of the transmissive window based on at least a ratio between the first detected radiation signal and the second detected radiation signal.
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Specification