Refractive Index Sensor Utilizing Gold Island Surface Plasmon Resonance on Optical Fiber

• US 20090015841A1
• Filed: 07/14/2008
• Published: 01/15/2009
• Est. Priority Date: 09/30/2004
• Status: Active Grant

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: DOWNEY, Todd R.
• Granted Patent: US 7,630,080 B2
• Time in Patent Office: Days
• US Class Current: 356/445
• CPC Class Codes: G01N 21/431 Dip refractometers, e.g. using optical fibres
• CPC Class Codes: G01N 21/553 and using surface plasmons fluorescence excitation G01N21/648; enhanced Raman G01N21/658

Abstract

A system for measuring an index of refraction that has a light emitting diode and a plurality of reference fibers not in contact with a sample to be measured and that receive light from the light emitting diode. A plurality of sensing fibers with different-shaped plasmon sensors are in contact with the sample and receive light from the light emitting diode. Detectors sense an output of the light from the fibers. The sensing fibers can be arrayed in a planar arrangement, or in a bundle. A cylindrical lens can be used for directing light into the fibers. A plurality of light emitting diodes can be used, each directing its light output into a corresponding fiber. A ball lens can be used for directing the light into the reference fiber. A plurality of wavelength filters can be placed between the light emitting diode and the sensing fiber, and a wavelength of the light entering the fiber may be selected using the filters.

Claims

1. A system, comprising:

a first reference fiber including first and second ends, the first end being configured to receive a beam of radiation and the second end capable of being spaced from a given sample;

sensing fibers respectively coupled to plasmon sensors having corresponding various shapes, each of the sensing fibers is configured to receive the beam of radiation and is capable of being in contact with the sample;

additional reference fibers, each of the additional reference fibers coupled to a plasmon sensor of a shape corresponding to a respective one of the sensing fibers, each of the additional reference fibers is configured to receive the beam of radiation, and is capable of being spaced from the sample;

reference detectors configured to sense outputs from the first and the additional reference fibers; and

sensing detectors configured to sense output from the sensing fibers.

2. The system of claim 1, wherein the sensing fibers are capable of being arranged in a planar array.

3. The system of claim 1, further comprising:

an optical device configured to direct the beam of radiation into at least one of the first reference fiber, one or more of the sensing fibers, and one or more of the additional reference fibers.

4. The system of claim 3, wherein the optical device is a cylindrical lens.

5. The system of claim 3, wherein the optical device is a ball lens.

6. The system of claim 1, further comprising:

a plurality of radiation sources that are configured to respectively direct corresponding beams of radiation into a corresponding one of the first reference fiber, the plurality of sensing fibers, and the additional reference fibers.

7. The system of claim 6, further comprising:

one or more wavelength filters positioned between the source of radiation and the sensing fibers, wherein a wavelength of the beam of radiation entering one or more of the sensing fibers is selected using the one or more wavelength filters.

8. The system of claim 1, wherein the sensing fibers are capable of being arranged in a bundle as an array.

9. A method, comprising:

directing light from an output of a first reference fiber onto a detector;

directing light from outputs of a plurality of sensing fibers, each of the plurality of sensing fibers coupled to a plasmon sensor of a different shape, onto the detector;

directing light from outputs of additional reference fibers having plasmon sensors of shapes that correspond to the plasmon sensors of the respective sensing fibers onto the detector;

measuring, for each incident wavelength of light, a respective shift of resonant absorption peak wavelength associated with the outputs from respective pairs of the plurality of sensing fibers and its corresponding one of the additional reference fibers relative to the output from the first reference fiber for an index of refraction of a given sample of media during recirculation of the media; and

calculating the index of refraction of a given sample of media based on the measured shifts of resonant absorption peak wavelengths for each of the incident wavelengths.

10. The method of claim 9, further comprising selecting a wavelength of light entering an input of the sensing fibers using wavelength filters.

11. The method of claim 9, further comprising focusing a light that is received at an input of the first reference fiber and the additional reference fibers using a ball lens.

12. The method of claim 9, further comprising focusing light that is received at an input of the sensing fibers using corresponding ball lenses.

13. The method of claim 9, further comprising focusing light from a plurality of light sources onto a cylindrical lens, the cylindrical lens focusing the light onto inputs of at least one of the first reference fiber, at least one of the additional reference fibers, and at least one of the plurality of sensing fibers.

14. The method of claim 9, further comprising using light emitting diodes as the plurality of light sources.

15. The method of claim 9, further comprising arranging the plurality of sensing fibers in a bundle.