Complex Microdevices and Apparatus and Methods for Fabricating Such Devices
First Claim
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1. A microdevice comprising at least one of:
- a. a sensor comprising at least two sets of capacitor plates wherein each set of plates comprises a plurality of plates;
b. an actuator comprising at least two sets of capacitor plates wherein each set includes a plurality of plates and wherein a motion of the actuator is perpendicular to a plane of the plates;
c. an actuator comprising at least two sets of capacitor plates wherein each set includes a plurality of plates and wherein a motion of the actuator is in a direction parallel to a plane of the plates, and wherein a portion of the plurality of plates in one set are positioned in a first plane while another portion of the plurality of the plates of the one set are positioned in a second plane offset from the first plane;
d. an actuator comprising at least two sets of capacitor plates wherein each set includes a plurality of plates and wherein a motion of the actuator is in a direction parallel to a plane of the plates, and wherein the plurality of plates in one set are positioned in an array that extends in three dimensions;
e. an electrostatic actuator comprising at least one moveable member and at least one actuation electrode for causing movement of the moveable member wherein the electrode and/or the moveable member is configured to have a contour that leads to a spacing between moveable member and the electrode when the moveable member is in its deflected position toward the electrode which is more uniform than when the moveable member is in an undeflected position;
f. an electrostatic actuator comprising at least one moveable member and at least one actuation electrode for causing movement of the moveable member wherein the electrode and/or the moveable member has a configuration that brings portions of the electrode and member closer together without significantly interfering with the movement of the member;
g. an electrostatic actuator comprising at least one moveable member and at least one actuation electrode for causing movement of the moveable member wherein the electrode has at least one sidewall or at least one protrusion in a region that reduces the separation between the electrode and the member without hindering the motion of the member;
h. an electrostatic actuator comprising at least one moveable member and at least two actuation electrodes that can be activated to create forces that pull the moveable member in opposing directions;
i. an electrostatically actuated micro-mirror scanning system comprising contoured electrodes that allow a reduced drive voltage without hindering mirror movement;
j. a structure comprising a multi-level micro flow channel;
ork. a metal mold have a plurality of levels having features with dimensions on the order of 10 s of microns or less.
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Abstract
Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB®).
59 Citations
19 Claims
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1. A microdevice comprising at least one of:
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a. a sensor comprising at least two sets of capacitor plates wherein each set of plates comprises a plurality of plates; b. an actuator comprising at least two sets of capacitor plates wherein each set includes a plurality of plates and wherein a motion of the actuator is perpendicular to a plane of the plates; c. an actuator comprising at least two sets of capacitor plates wherein each set includes a plurality of plates and wherein a motion of the actuator is in a direction parallel to a plane of the plates, and wherein a portion of the plurality of plates in one set are positioned in a first plane while another portion of the plurality of the plates of the one set are positioned in a second plane offset from the first plane; d. an actuator comprising at least two sets of capacitor plates wherein each set includes a plurality of plates and wherein a motion of the actuator is in a direction parallel to a plane of the plates, and wherein the plurality of plates in one set are positioned in an array that extends in three dimensions; e. an electrostatic actuator comprising at least one moveable member and at least one actuation electrode for causing movement of the moveable member wherein the electrode and/or the moveable member is configured to have a contour that leads to a spacing between moveable member and the electrode when the moveable member is in its deflected position toward the electrode which is more uniform than when the moveable member is in an undeflected position; f. an electrostatic actuator comprising at least one moveable member and at least one actuation electrode for causing movement of the moveable member wherein the electrode and/or the moveable member has a configuration that brings portions of the electrode and member closer together without significantly interfering with the movement of the member; g. an electrostatic actuator comprising at least one moveable member and at least one actuation electrode for causing movement of the moveable member wherein the electrode has at least one sidewall or at least one protrusion in a region that reduces the separation between the electrode and the member without hindering the motion of the member; h. an electrostatic actuator comprising at least one moveable member and at least two actuation electrodes that can be activated to create forces that pull the moveable member in opposing directions; i. an electrostatically actuated micro-mirror scanning system comprising contoured electrodes that allow a reduced drive voltage without hindering mirror movement; j. a structure comprising a multi-level micro flow channel;
ork. a metal mold have a plurality of levels having features with dimensions on the order of 10 s of microns or less. - View Dependent Claims (2)
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3. A process for forming a multilayer microdevice, comprising:
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(a) forming a layer of at least one material on a substrate that may include one or more previously deposited layers of one or more materials; (b) repeating the forming operation of “
(a)”
one or more times to form at least one subsequent layer on at least one previously formed layer to build up a three-dimensional structure from a plurality layers;wherein the forming of at least one layer, comprises; (1) supplying a substrate on which one or more successive depositions of one or more materials may have occurred; (2) supplying a mask having a desired pattern or capable of being activated to effectively deposit or etch a desired pattern of material; (3) bringing the mask and the substrate into contact or proximity such that electrochemical process pockets are formed having a desired registration with respect to any previous depositions and providing a desired electrolyte solution such that the solution is provided within the electrochemical process pockets; and (4) applying a desired electrical activation to cause a desired material to be deposited onto the substrate or removed from the substrate in preparation for deposition of a material onto the substrate; wherein the microdevice includes one or more of the following; i. an accelerometer, ii. a switch, iii. a valve, iv. a 3-D tilt mirror, v. a fluid well, vi. a tool for producing other microstructures or structures with micro-patterning, vii. an actuator including a contoured electrode, viii. a bellows controlled valve, ix. an actuator with pull down and pull up electrodes, x. a valve comprising a shape memory device, xi. a bistable valve, xii. a device at least partly surrounded by a conductive shield wall. - View Dependent Claims (4)
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5. A microdevice, comprising:
a plurality of layers of successively deposited material, wherein the deposition of each layer of material comprises, a. deposition of at least a first material; and b. deposition of at least a second material; and wherein at least a portion of the first or second material is removed after deposition of the plurality of layers; and wherein a structure resulting from the deposition and the removal provides at least one structure that can function as (1) an accelerometer, (2) a toroidal inductor, (3) a switch, (4) a valve, (5) a helical inductor, (6) a 3-D tilt mirror, (7) a fluid well, (8) an antenna, or (9) a mold. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
Specification