MANUFACTURING PROCESS FOR INTEGRATED MICROELECTROMECHANICAL COMPONENTS
First Claim
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1. A method for producing integrated microelectromechanical components, the method comprising:
- providing a first conductive layer on a first insulating layer;
structuring the first conductive layer;
providing a second insulating layer;
providing a second conductive layer;
providing at least one etch opening for at least partial etching of the second insulating layer beneath the second conductive layer in order to produce at least one hollow space; and
electrically contacting at least a portion of the first conductive layer and the second conductive layer.
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Abstract
A method for producing integrated microelectromechanical components is provided, whereby a first conductive layer is produced on a first insulating layer, the first conductive layer is structured, a second insulating layer is produced, a second conductive layer is produced, at least one etch opening is produced for at least partial etching of the second insulating layer beneath the second conductive layer in order to produce at least one hollow space, and at least a part of the first conductive layer and the second conductive layer is electrically contacted.
6 Citations
20 Claims
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1. A method for producing integrated microelectromechanical components, the method comprising:
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providing a first conductive layer on a first insulating layer; structuring the first conductive layer; providing a second insulating layer; providing a second conductive layer; providing at least one etch opening for at least partial etching of the second insulating layer beneath the second conductive layer in order to produce at least one hollow space; and electrically contacting at least a portion of the first conductive layer and the second conductive layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A microelectromechanical component comprising:
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at least two insulating layers; at least two conductive layers, wherein a conductive layer is located on an insulating layer; and at least one membrane being provided over at least one hollow space, the hollow space being provided at least partially in the second insulating layer. - View Dependent Claims (19, 20)
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Specification