Liquid crystal display device
First Claim
1. A liquid crystal display device comprising:
- a gate electrode;
a gate insulating film formed over the gate electrode;
a microcrystalline semiconductor film including a channel formation region formed over the gate insulating film;
a buffer layer formed over the microcrystalline semiconductor film;
a channel protective layer which is formed over the buffer layer to overlap with the channel formation region of the microcrystalline semiconductor film;
a source region and a drain region formed over the channel protective layer and the buffer layer; and
a source electrode and a drain electrode formed over the source region and the drain region.
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Accused Products
Abstract
It is an object to provide a liquid crystal display device including a thin film transistor with high electric characteristics and high reliability. As for a liquid crystal display device including an inverted staggered thin film transistor of a channel stop type, the inverted staggered thin film transistor includes a gate electrode, a gate insulating film over the gate electrode, a microcrystalline semiconductor film including a channel formation region over the gate insulating film, a buffer layer over the microcrystalline semiconductor film, and a channel protective layer which is formed over the buffer layer so as to overlap with the channel formation region of the microcrystalline semiconductor film.
66 Citations
20 Claims
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1. A liquid crystal display device comprising:
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a gate electrode; a gate insulating film formed over the gate electrode; a microcrystalline semiconductor film including a channel formation region formed over the gate insulating film; a buffer layer formed over the microcrystalline semiconductor film; a channel protective layer which is formed over the buffer layer to overlap with the channel formation region of the microcrystalline semiconductor film; a source region and a drain region formed over the channel protective layer and the buffer layer; and a source electrode and a drain electrode formed over the source region and the drain region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A liquid crystal display device comprising:
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a gate electrode; a gate insulating film formed over the gate electrode; a microcrystalline semiconductor film including a channel formation region formed over the gate insulating film; a buffer layer formed over the microcrystalline semiconductor film; a channel protective layer which is formed over the buffer layer to overlap with the channel formation region of the microcrystalline semiconductor film; a source region and a drain region formed over the channel protective layer and the buffer layer; a source electrode and a drain electrode formed over the source region and the drain region; and an insulating film formed over the channel protective layer, the source electrode, and the drain electrode. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification