METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
First Claim
1. A method for manufacturing a semiconductor device, the method comprising the steps of:
- forming a dummy gate insulating film and a dummy gate electrode over a semiconductor substrate having a channel forming region;
forming source and drain regions in the semiconductor substrate by using the dummy gate electrode as a mask;
forming a first insulating film by using an insulating material having higher resistance against a hydrofluoric acid than silicon oxide in such a way that the first insulating film has a thickness larger than a thickness of the dummy gate electrode and covers the dummy gate electrode;
forming a second insulating film on the first insulating film by using an insulating material different from the insulating material of the first insulating film;
removing the second insulating film from a top surface of the second insulating film until a top part of the first insulating film is exposed;
simultaneously removing the first insulating film and the second insulating film that remains, while planarizing the first insulating film and the second insulating film that remains, from a top surface of the first insulating film until the dummy gate electrode is exposed;
forming a gate electrode trench by removing the dummy gate electrode and the dummy gate insulating film;
forming a gate insulating film on a bottom of the gate electrode trench; and
forming a gate electrode by filling an inside of the gate electrode trench above the gate insulating film with an electrically-conductive material, whereina field effect transistor is formed by the method.
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Accused Products
Abstract
A method for manufacturing a semiconductor device, includes the steps of forming a dummy gate insulating film and a dummy gate electrode, forming source and drain regions, forming a first insulating film, forming a second insulating film, removing the second insulating film, simultaneously removing the first insulating film and the second insulating film that remains, while planarizing the first insulating film and the second insulating film that remains, forming a gate electrode trench by removing the dummy gate electrode and the dummy gate insulating film, forming a gate insulating film, and forming a gate electrode, wherein a field effect transistor is formed by the method.
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Citations
8 Claims
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1. A method for manufacturing a semiconductor device, the method comprising the steps of:
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forming a dummy gate insulating film and a dummy gate electrode over a semiconductor substrate having a channel forming region; forming source and drain regions in the semiconductor substrate by using the dummy gate electrode as a mask; forming a first insulating film by using an insulating material having higher resistance against a hydrofluoric acid than silicon oxide in such a way that the first insulating film has a thickness larger than a thickness of the dummy gate electrode and covers the dummy gate electrode; forming a second insulating film on the first insulating film by using an insulating material different from the insulating material of the first insulating film; removing the second insulating film from a top surface of the second insulating film until a top part of the first insulating film is exposed; simultaneously removing the first insulating film and the second insulating film that remains, while planarizing the first insulating film and the second insulating film that remains, from a top surface of the first insulating film until the dummy gate electrode is exposed; forming a gate electrode trench by removing the dummy gate electrode and the dummy gate insulating film; forming a gate insulating film on a bottom of the gate electrode trench; and forming a gate electrode by filling an inside of the gate electrode trench above the gate insulating film with an electrically-conductive material, wherein a field effect transistor is formed by the method. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification