RADIO FREQUENCY POWER SUPPLY
First Claim
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1. A plasma supply device comprising:
- a full bridge circuit connectable to a DC power supply, the full bridge including two half bridges, each half bridge including two switching elements connected in series via a center between the switching elements; and
a power transformer with a primary winding connected to the centers of the half bridges,wherein the primary winding comprises a tapping connectable to a potential between two potentials of the DC power supply.
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Abstract
A plasma supply device includes a full bridge circuit that is connected to a DC power supply and that has two half bridges each with two series connected switching elements. The plasma supply device further includes a primary winding of a power transformer connected to centers of the half bridges between the switching elements. The primary winding includes a tapping connectable to an alternating current center between the potentials of the DC power supply.
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Citations
20 Claims
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1. A plasma supply device comprising:
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a full bridge circuit connectable to a DC power supply, the full bridge including two half bridges, each half bridge including two switching elements connected in series via a center between the switching elements; and a power transformer with a primary winding connected to the centers of the half bridges, wherein the primary winding comprises a tapping connectable to a potential between two potentials of the DC power supply. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for operating a plasma supply device including a DC power supply, a full bridge with four switching elements, and a power transformer connected to the full bridge and including a primary winding with a tapping, the method comprising:
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zero-voltage switching of at least some of the switching elements; regulating a power by phase shifting; providing an alternating current center between the potentials of the DC power supply; and applying the alternating current center to the tapping of the primary winding. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A system comprising:
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a DC power supply; and a plasma supply device including a full bridge circuit connected to the DC power supply, the full bridge including two half bridges, each half bridge including two switching elements connected in series via a center between the switching elements, and a power transformer with a primary winding connected to the centers of the half bridges, wherein the primary winding comprises a tapping connected to a potential between two potentials of the DC power supply. - View Dependent Claims (18, 19, 20)
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Specification