Trench MOSFET with multiple P-bodies for ruggedness and on-resistance improvements
First Claim
1. A vertical semiconductor power device comprising a plurality of semiconductor power cells having a drain disposed at a bottom of a semiconductor substrate with each of said cells comprising a gate surrounded by a body region encompassing a source region wherein:
- said body region further comprising multiple body-dopant implanted regions having a non-Gaussian distribution dopant profile for reducing a width of a transition region transitioning between said multiple body-dopant implanted regions and an epitaxial region underneath having a different conductivity type from said multiple body-dopant implanted regions.
1 Assignment
0 Petitions
Accused Products
Abstract
A vertical semiconductor power device includes a plurality of semiconductor power cells having a drain disposed at a bottom of a semiconductor substrate. Each of the cells includes a gate surrounded by a body region encompassing a source region. The body region further includes multiple body-dopant implanted regions having a non-Gaussian distribution dopant profile for reducing a width of a transition region transitioning between the multiple body-dopant implanted regions and an epitaxial region underneath having a different conductivity type from the multiple body-dopant implanted regions.
-
Citations
20 Claims
-
1. A vertical semiconductor power device comprising a plurality of semiconductor power cells having a drain disposed at a bottom of a semiconductor substrate with each of said cells comprising a gate surrounded by a body region encompassing a source region wherein:
said body region further comprising multiple body-dopant implanted regions having a non-Gaussian distribution dopant profile for reducing a width of a transition region transitioning between said multiple body-dopant implanted regions and an epitaxial region underneath having a different conductivity type from said multiple body-dopant implanted regions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
12. A method for manufacturing a vertical semiconductor power device comprising a plurality of semiconductor power cells having a drain disposed at a bottom of a semiconductor substrate with each of said cells comprising a gate surrounded by a body region encompassing a source region comprising:
performing multiple body-dopant implantations to form multiple body-dopant implanted regions having a non-Gaussian distribution dopant profile for reducing a width of a transition region transitioning between said multiple body-dopant implanted regions and an epitaxial region underneath having a different conductivity type from said multiple body-dopant implanted regions. - View Dependent Claims (13, 14, 15)
-
16. An electronic device comprising a vertical semiconductor power device that further includes a plurality of semiconductor power cells having a drain disposed at a bottom of a semiconductor substrate with each of said cells comprising a gate surrounded by a body region encompassing a source region wherein:
said body region further comprising multiple body-dopant implanted regions having a non-Gaussian distribution dopant profile for reducing a width of a transition region transitioning between said multiple body-dopant implanted regions and an epitaxial region underneath having a different conductivity type from said multiple body-dopant implanted regions. - View Dependent Claims (17, 18, 19, 20)
Specification