MICROMECHANICAL DEVICE WITH PIEZOELECTRIC AND ELECTROSTATIC ACTUATION AND METHOD THEREFOR
First Claim
1. A method, comprising:
- providing a device having both piezoelectric actuation and electrostatic actuation which operates using a piezoelectric actuation voltage less than or equal to ten volts and which operates using an electrostatic actuation voltage less than or equal to ten volts.
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Accused Products
Abstract
A MEMS device uses both piezoelectric actuation and electrostatic actuation and also provides enough electrostatic force to enable very low voltage operation. As the electrostatic actuation uses DC and the piezoelectric actuation uses high frequency, the structure of the device minimizes the coupling of the two actuator structures to reduce noise. In addition, for some embodiments, the location of the physical structures of the piezoelectric actuator and electrostatic actuator generates higher contact force with lower voltage. For some embodiments, the piezoelectric actuator and electrostatic actuator of the device are connected at the contact shorting bar or capacitor plate location. This makes the contact shorting bar or capacitor plate the focal point of the forces generated by all of the actuators, thereby increasing the switch contact force.
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Citations
20 Claims
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1. A method, comprising:
providing a device having both piezoelectric actuation and electrostatic actuation which operates using a piezoelectric actuation voltage less than or equal to ten volts and which operates using an electrostatic actuation voltage less than or equal to ten volts. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method, comprising:
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providing a system having a power supply voltage less than or equal to ten volts; providing a piezoelectric actuator which operates using a piezoelectric actuation voltage equal to the power supply voltage of less than or equal to ten volts; and providing an electrostatic actuator which operates using an electrostatic actuation voltage equal to the power supply voltage of less than or equal to ten volts, the electrostatic actuator having at least one of a contact shorting bar or a capacitor electrode, wherein the piezoelectric actuator and the electrostatic actuator are coupled at the at least one of the contact shorting bar or the capacitor electrode. - View Dependent Claims (13, 14, 15)
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16. A device, comprising:
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a piezoelectric actuator, wherein the piezoelectric actuator has an actuation voltage less than ten volts; and an electrostatic actuator, wherein the electrostatic actuator has an actuation voltage less than ten volts. - View Dependent Claims (17, 18, 19, 20)
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Specification