REFERENCE SIGNAL GENERATING CONFIGURATION FOR AN INTERFEROMETRIC MINIATURE GRATING ENCODER READHEAD USING FIBER OPTIC RECEIVER CHANNELS

• US 20090027692A1
• Filed: 07/24/2007
• Published: 01/29/2009
• Est. Priority Date: 07/24/2007
• Status: Abandoned Application

• Current Assignee: Mitutoyo Corporation
• Original Assignee: Mitutoyo Corporation
• Inventors: Masreliez, Karl Gustav, Harsila, Scott, Zwilling, Avron, Tobiason, Joseph Daniel
• Application Number:
  US11/782,608
• Publication Number:
  US 20090027692A1
• Time in Patent Office: Days
• US Class Current: 356/617
• CPC Class Codes: G01D 5/34723 involving light-guides
• CPC Class Codes: G01D 5/34776 Absolute encoders with analogue or digital scales

Abstract

A fiber optic readhead and scale arrangement for measuring displacement provides a reference position indication. The scale includes a scale track comprising a first type of track portion providing first level of zero order reflectance, such as a grating, and a reference mark providing a second level of zero order reflectance, such as a mirror. The reference mark is configured with certain length or boundary spacing dimensions determined based on certain fiber optic receiver channel aperture dimensions in the readhead.

In some configurations a fiber optic readhead and track that provides the reference position indication is separate from a fiber optic readhead and track that provides periodic incremental measurement signals. In some configurations an integrated fiber optic readhead and an integrated track structure provide both the reference position indication and the periodic incremental measurement signals.

Claims

1. A fiber optic readhead and scale arrangement for measuring the relative displacement between two members along a measuring axis direction and for providing a reference position indication, the fiber optic readhead and scale arrangement comprising:

at least a first fiber optic readhead, the first fiber optic readhead comprising a light source that outputs a first diverging source light, and at least first and second fiber optic reference mark signal receiver channels that are operable to provide respective reference mark signals; and

a scale member comprising at least a first scale track extending along a measuring axis direction, the first scale track comprising;

a first type of track portion that provides a first amount of zero order reflectance when illuminated by the diverging source light; and

at least one reference mark portion located within the first type of track portion, the at least one reference mark portion providing a second amount of zero order reflectance that is different than the first amount of zero order reflectance when illuminated by the diverging source light,

wherein;

the first fiber optic reference mark signal receiver channel comprises a first reference mark signal receiver channel optical fiber and a first reference mark signal receiver channel aperture, the second fiber optic reference mark signal receiver channel comprises a second reference mark signal receiver channel optical fiber and a second reference mark signal receiver channel aperture, and when the first fiber optic readhead is operably positioned relative to the first scale track the boundaries of the first and second reference mark signal receiver channel apertures that are closest to one another are separated by a dimension AR12SEP along the measuring axis direction, and the boundaries of the first and second reference mark signal receiver channel apertures that are farthest from one another span a total aperture span dimension AR12SPAN along the measuring axis direction;

the at least one reference mark portion is configured to such that two reference mark portion boundaries are separated by an edge-to-edge dimension LETOE along the measuring axis direction;

the at least one reference mark portion and the first and second fiber optic reference mark signal receiver channels are configured such that AR12SEP<

(2*LETOE)<

AR12SPAN; and

the respective reference mark signals define a reference position within a signal crossing region proximate to the at least one reference mark portion.

2. The fiber optic readhead and scale arrangement of claim 1, wherein the at least one reference mark portion and the first and second fiber optic reference mark signal receiver channels are configured such that [AR12SEP+(0.25*(AR12SPAN−

AR12SEP))]<

(2*LETOE)<

[AR12SEP+(0.75*(AR12SPAN−

AR12SEP))].

3. The fiber optic readhead and scale arrangement of claim 2, wherein the at least one reference mark portion and the first and second fiber optic reference mark signal receiver channels are configured such that [AR12SEP+0.4*(AR12SPAN−

AR12SEP)]<

(2*LETOE)<

[AR12SEP+0.6*(AR12SPAN−

AR12SEP)].

4. The fiber optic readhead and scale arrangement of claim 1, wherein the at least one reference mark portion consists of a single reference mark portion having outer boundaries that are separated by the edge-to-edge dimension LETOE.

5. The fiber optic readhead and scale arrangement of claim 1, wherein the at least one reference mark portion comprises first and second reference mark sub-portions, configured according one of configuration A and configuration B, wherein, in configuration A the interior boundaries of the first and second reference mark sub-portions which are closest to one another are separated by the edge-to-edge dimension LETOE, and, in configuration B the exterior boundaries of the first and second reference mark sub-portions which are farthest from one another are separated by the edge-to-edge dimension LETOE.

6. The fiber optic readhead and scale arrangement of claim 5, each of first and second reference mark sub-portions has a dimension along the measuring axis direction which is at least 0.25*(AR12SPAN−

AR12SEP) and at most 0.75*(AR12SPAN−

AR12SEP).

7. The fiber optic readhead and scale arrangement of claim 6, each of first and second reference mark sub-portions has a dimension along the measuring axis direction which is at least 0.4*(AR12SPAN-AR12SEP) and at most 0.6*(AR12SPAN−

AR12SEP).

8. The fiber optic readhead and scale arrangement of claim 1, wherein the first diverging source light is spatially coherent and monochromatic, the first type of track portion is one of a phase grating portion configured to suppress zero-order reflection of the first diverging source light and a zero order reflection portion, and the at least one reference mark portion is the other of a phase grating portion configured to suppress zero-order reflection of the first diverging source light and a zero order reflection portion.

9. The fiber optic readhead and scale arrangement of claim 8, wherein the zero order reflection portion is a mirror portion.

10. The fiber optic readhead and scale arrangement of claim 1, wherein:

a light receiving area of each fiber optic reference mark signal receiver channel aperture is defined by at least one of a) a light carrying core area of a corresponding reference mark signal receiver channel optical fiber, and b) an aperture mask that includes no spatially periodic structure and that is located proximate to the end of the corresponding reference mark signal receiver channel optical fiber to cover a portion of the light carrying core area.

11. The fiber optic readhead and scale arrangement of claim 1, wherein:

the first light source comprises the end of a source optical fiber;

the first and second reference mark signal receiver channel optical fibers are located parallel to and proximate to the source optical fiber; and

all optical fibers located within the first fiber optic readhead, including the source optical fiber and the first and second reference mark signal receiver channel optical fibers, are located within a cylindrical volume having a diameter of at most 1.5 millimeters.

12. The fiber optic readhead and scale arrangement of claim 11, wherein the cylindrical volume has a diameter of at most 1.0 millimeter.

13. The fiber optic readhead and scale arrangement of claim 1, further comprising:

a second scale track arranged on the scale member proximate to the first scale track, the second scale track comprising a reflective periodic scale grating extending along the measuring axis direction, and

a second fiber optic readhead arranged proximate to the first fiber optic readhead, the second fiber optic readhead comprising a second light source that outputs a second diverging source light comprising spatially coherent monochromatic light, and a plurality of respective fiber optic incremental measurement signal receiver channels that are operable to provide respective spatially periodic incremental measurement signals, each respective fiber optic incremental measurement signal receiver channel comprising a respective incremental measurement signal receiver channel optical fiber and a respective incremental measurement signal receiver channel spatial phase mask portion arranged proximate to an end of that optical fiber, the respective incremental measurement signal receiver channel spatial phase mask portion having a respective spatial phase and having light-blocking elements arranged at a pitch that is operable for spatially filtering a spatially periodic intensity pattern that arises at a nominal receiver plane when the second diverging source light is received and reflected by the reflective periodic scale grating,

wherein;

the fiber optic readhead and scale arrangement is configured such that the first and second fiber optic readheads are fixed relative to one another,

the respective reference mark signals define a reference position that is repeatable to within less than one-half period of the spatially periodic incremental measurement signals within the signal crossing region proximate to the at least one reference mark portion.

14. The fiber optic readhead and scale arrangement of claim 13, wherein:

the first diverging source light is spatially coherent and monochromatic;

the first type of track portion is one of a phase grating portion configured to suppress zero-order reflection of the first diverging source light and a zero order reflection portion;

the at least one reference mark portion is the other of a phase grating portion configured to suppress zero-order reflection of the first diverging source light and a zero order reflection portion;

the reflective periodic scale grating of the second scale track is a phase grating configured to suppress zero-order reflection of the second diverging source light; and

the reflective periodic scale grating of the second scale track and the phase grating portion of the first scale track each have nominally the same recess height between their grating elements.

15. The fiber optic readhead and scale arrangement of claim 1, wherein:

the first diverging source light is spatially coherent and monochromatic;

the first scale track comprises a reflective periodic scale grating extending over a displacement measuring range along the measuring axis direction, the reflective periodic scale grating is a phase grating configured to suppress zero-order reflection of the first diverging source light;

the first type of track portion that provides the first amount of zero order reflectance is provided by a portion of the reflective periodic scale grating that is proximate to the at least one reference mark portion;

the at least one reference mark portion comprises a zero order reflection portion; and

the first fiber optic readhead further comprises a plurality of respective fiber optic incremental measurement signal receiver channels that are operable to provide respective spatially periodic incremental measurement signals, each respective fiber optic incremental measurement signal receiver channel comprising a respective incremental measurement signal receiver channel optical fiber and a respective incremental measurement signal receiver channel spatial phase mask portion arranged proximate to an end of that optical fiber, the respective incremental measurement signal receiver channel spatial phase mask portion having a respective spatial phase and having light-blocking elements arranged at a pitch that is operable for spatially filtering a spatially periodic intensity pattern that arises at a nominal receiver plane when the first diverging source light is received and reflected by the reflective periodic scale grating;

wherein;

the respective reference mark signals define a reference position that is repeatable to within less than one-half period of the spatially periodic incremental measurement signals within the signal crossing region proximate to the at least one reference mark portion.

16. The fiber optic readhead and scale arrangement of claim 15, wherein:

the zero order reflection portion is a mirror portion; and

a light receiving area of each fiber optic reference mark signal receiver channel aperture is defined by at least one of a) a light carrying core area of a corresponding reference mark signal receiver channel optical fiber, and b) an aperture mask that includes no spatially periodic structure and that is located proximate the end of the corresponding reference mark signal receiver channel optical fiber to cover a portion of the light carrying core area.

17. The fiber optic readhead and scale arrangement of claim 16, wherein the at least one reference mark portion and the first and second fiber optic reference mark signal receiver channels are configured such that [AR12SEP+(0.25*(AR12SPAN−

AR12SEP))]<

(2*LETOE)<

[AR12SEP+(0.75*(AR12SPAN−

AR12SEP))].

18. The fiber optic readhead and scale arrangement of claim 17, wherein:

the first light source comprises the end of a source optical fiber;

the first and second reference mark signal receiver channel optical fibers and each of the respective incremental measurement signal receiver channel optical fibers are located parallel to and proximate to the source optical fiber; and

all optical fibers located within the first fiber optic readhead, including the source optical fiber, the first and second reference mark signal receiver channel optical fibers, and each of the respective incremental measurement signal receiver channel optical fibers, are located within a cylindrical volume having a diameter of at most 1.5 millimeters.

19. The fiber optic readhead and scale arrangement of claim 18, wherein the cylindrical volume has a diameter of at most 1.0 millimeter.

20. The fiber optic readhead and scale arrangement of claim 15, wherein the reflective periodic scale grating has a grating pitch of at least 2 microns and at most 8 microns.