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RF POWER SUPPLY

  • US 20090027936A1
  • Filed: 07/23/2008
  • Published: 01/29/2009
  • Est. Priority Date: 07/23/2007
  • Status: Active Grant
First Claim
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1. An RF power supply for generating an output power larger than 500 W at an output frequency of at least 3 MHz, the RF power supply comprising:

  • at least one inverter that is configured to be connected to a DC power supply and that has with at least one switching element, that is supplied with a floating reference potential in operation;

    at least one output network coupled to the at least one inverter; and

    an accompanying line connecting an electrical component of the inverter at a floating reference potential to an access point at a non-floating potential.

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