Removable compartments for workpiece stocker

• US 20090028669A1
• Filed: 07/25/2007
• Published: 01/29/2009
• Est. Priority Date: 07/25/2007
• Status: Abandoned Application

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Dynamic Micro Systems
• Inventors: Rebstock, Lutz
• Application Number:
  US11/881,087
• Publication Number:
  US 20090028669A1
• Time in Patent Office: Days
• US Class Current: 414/1
• CPC Class Codes: B25J 15/0052 multiple gripper units or multiple end effectors
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Abstract

The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable compartments for storing workpieces so that in emergency events, such as power failure or equipment failure, the workpieces can be removed from the equipment for continuing processing without disrupting the flow of the fabrication facility. The compartmentable equipment can comprise emergency access ports, including mating interface to a portable workpiece removal equipment to allow accessing the individual compartments without compromising the quality, defects and yield of the workpieces stored in the stocker.

Claims

1. A workpiece stocker comprising

a chamber for storing a plurality of workpieces, the chamber being compartmentalized into a plurality of compartments;

a robotic mechanism to transfer the workpieces from the chamber to an IO station; and

a plurality of emergency access ports for accessing the workpieces in the event of the robotic failure, the emergency access ports accessing individual compartments to prevent contamination to other compartments.

2. A workpiece stocker as in claim 1 further comprising a shut down mechanism to isolate individual compartments to prevent contamination to other compartments when one compartment is open through an emergency access port.

3. A workpiece stocker as in claim 2 wherein the shut down mechanism is triggered when the robotic mechanism fails.

4. A workpiece stocker as in claim 1 wherein the emergency access ports access individual compartments.

5. A workpiece stocker as in claim 1 wherein the robotic mechanism comprises a one-piece circumferential edge gripper for handling the workpiece.

6. A workpiece stocker as in claim 1

wherein the workpieces are densely stored with less than 2.5 mm pitch;

and

wherein the robotic mechanism comprises a one-piece circumferential edge gripper for handling the densely-packed workpiece.

7. A workpiece stocker as in claim 1 further comprising a sensor mechanism to detect the robotic failure.

8. A workpiece stocker as in claim 1 further comprising a load lock for the emergency access ports.

9. A workpiece stocker comprising

a chamber for storing a plurality of workpieces, the chamber being compartmentalized into a plurality of compartments,

wherein the compartments are normally sealed within the chamber;

a robotic mechanism to transfer the workpieces from the chamber to an IO station,

wherein the robotic mechanism unseals the individual compartment containing the workpieces to be transferred before accessing the workpieces; and

a plurality of emergency access ports for accessing the workpieces in the event of the robotic failure,

wherein the workpieces are prevented from contamination by being sealed within the compartments when the chamber is exposed to the outside ambient during an emergency access.

10. A workpiece stocker as in claim 9 further comprising a look-ahead mechanism for unsealing individual compartments.

11. A workpiece stocker as in claim 10 wherein the look-ahead mechanism unsealed at least one compartment prior to being needed.

12. A workpiece stocker as in claim 9 further comprising a controller for determining the individual compartments needed to be unsealed.

13. A workpiece stocker as in claim 12 further comprising a look-ahead mechanism for unsealing individual compartments.

14. A workpiece stocker as in claim 9 wherein the robotic mechanism comprises a one-piece circumferential edge gripper for handling the workpiece.

15. A workpiece stocker as in claim 14

wherein the workpieces are densely stored with less than 2.5 mm pitch;

and

wherein the robotic mechanism comprises a one-piece circumferential edge gripper for handling the densely-packed workpiece.

16. A workpiece stocker as in claim 9 further comprising a sensor mechanism to detect the robotic failure.

17. A workpiece stocker comprising

a chamber for storing a plurality of workpieces;

a robotic mechanism to transfer the workpieces from the chamber to an IO station; and

an emergency access port for accessing the workpieces in the event of the robotic failure, the emergency access port comprising

a mating interface to a portable workpiece removal equipment,

wherein the mating interface allows the removal of the workpieces without exposing to outside ambient.

18. A workpiece stocker as in claim 17 further comprising a portable clean room for mating with the mating interface.

19. A workpiece stocker as in claim 17 further comprising a load lock for the emergency access ports.

20. A workpiece stocker as in claim 17 wherein the emergency access port is accessed by an operator.