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Manufacturing method of display device

  • US 20090029498A1
  • Filed: 07/18/2008
  • Published: 01/29/2009
  • Est. Priority Date: 07/27/2007
  • Status: Active Grant
First Claim
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1. A method for manufacturing a display device comprising the steps of:

  • supplying a reactive gas containing helium to a treatment chamber provided with a plurality of waveguides aligned to extend in a comb shape in the treatment chamber; and

    forming a microcrystalline semiconductor layer over a substrate placed in the treatment chamber by supplying a microwave to space between the plurality of waveguides, to generate plasma while holding the pressure of the treatment chamber at a pressure of 1×

    102 Pa or more and 1×

    105 Pa or less.

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