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Micromechanical Rotational Speed Sensor

  • US 20090031806A1
  • Filed: 03/12/2007
  • Published: 02/05/2009
  • Est. Priority Date: 03/10/2006
  • Status: Active Grant
First Claim
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1. Micromechanical rotational rate sensor with a substrate (9), at least one base element (1) suspended by at least one spring elements (11, 11

  • ) on the substrate (9), which base element comprises at least one seismic mass (3), an excitation means (8) and a read-out arrangement (15), characterized in that the spring element (11, 11

    ) is movable perpendicularly to the motion direction (X, Y) of the base element (1).

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