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SYMMETRICAL DIFFERENTIAL CAPACITIVE SENSOR AND METHOD OF MAKING SAME

  • US 20090031809A1
  • Filed: 08/03/2007
  • Published: 02/05/2009
  • Est. Priority Date: 08/03/2007
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a Micro Electro-Mechanical System (MEMS) sensor, said sensor comprising;

    a substrate;

    a movable sensing element attached to said substrate, said element being adapted for motion relative to a rotational axis substantially geometrically centered between first and second ends of said movable sensing element to form a first section between said rotational axis and said first end and a second section between said rotational axis and said second end, said first section including first apertures extending through said movable element to produce said first section having a first mass, said second section including second apertures extending through said movable element to produce said second section having a second mass that is less than said first mass; and

    at least one electrode positioned on said substrate facing said first and second sections of said movable element.

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