Methods and Systems to Compensate for a Stitching Disturbance of a Printed Pattern in a Maskless Lithography System Not Utilizing Overlap of the Exposure Zones
First Claim
1. An apparatus configured for forming a pattern within an area of a photosensitive surface, comprising:
- means for performing a first exposure of the photosensitive surface in accordance with predetermined image data;
wherein the first exposure produces a first image within the area;
means for identifying image deficiencies within a region of the first image;
means for adjusting the image data to compensate for the identified image deficiencies; and
means for performing a second exposure of the photosensitive surface in accordance with the adjusted image data.
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Abstract
A method and system are provided for forming a pattern within an area of a photosensitive surface. An exemplary method includes performing a first exposure of the photosensitive surface in accordance with predetermined image data, wherein the first exposure occurs during a first pass and produces a first image within the area. The image data is adjusted to compensate for identified image deficiencies image deficiencies, the image deficiencies being within a region of the first image. A second exposure, of the photosensitive surface, is performed in accordance with the adjusted image data during a second pass.
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Citations
10 Claims
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1. An apparatus configured for forming a pattern within an area of a photosensitive surface, comprising:
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means for performing a first exposure of the photosensitive surface in accordance with predetermined image data; wherein the first exposure produces a first image within the area; means for identifying image deficiencies within a region of the first image; means for adjusting the image data to compensate for the identified image deficiencies; and means for performing a second exposure of the photosensitive surface in accordance with the adjusted image data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification