Lithography apparatus with flexibly supported optical system
First Claim
Patent Images
1. A lithography apparatus comprising:
- a projection optical system that projects an image of a pattern;
a first support member;
a second support member coupled to the first support member and supporting at least one metrology component; and
a flexible coupling device that flexibly couples the projection optical system to the second support member.
1 Assignment
0 Petitions
Accused Products
Abstract
A lithography apparatus includes a projection optical system that projects an image of a pattern, a first support member, a second support member that is flexibly coupled to the first support member by a first flexible coupling device such that the second support member is suspended from the first support member, and a second flexible coupling device that flexibly couples the projection optical system to the second support structure. This arrangement is capable of improving the vibration characteristics of the projection optical system.
-
Citations
67 Claims
-
1. A lithography apparatus comprising:
-
a projection optical system that projects an image of a pattern; a first support member; a second support member coupled to the first support member and supporting at least one metrology component; and a flexible coupling device that flexibly couples the projection optical system to the second support member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
-
-
26. A lithography apparatus comprising:
-
a projection optical system that projects an image of a pattern; a first support member; a metrology frame to which is mounted a measuring unit that measures a positional relationship between the projection optical system and a predetermined member; a first flexible coupling device that flexibly couples the metrology frame to the first support member; and a second flexible coupling device that flexibly couples the projection optical system to the metrology frame. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
-
-
49. A lithography apparatus comprising:
-
a projection optical system that projects an image of a pattern; a first support member; a second support member; a first flexible coupling having at least three flexible suspension members that flexibly couple the second support member to the first support member such that the second support member is suspended from the first support member; and a second flexible coupling having at least three vibration isolation mounts disposed between the projection optical system and the second support member to flexibly couple the projection optical system to the second support member. - View Dependent Claims (50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67)
-
Specification