Movable Body Drive Method and Movable Body Drive System, Pattern Formation Method and Pattern Formation Apparatus, and Device Manufacturing Method
First Claim
1. A movable body drive method of driving a movable body along a predetermined plane, the method comprising:
- a drive process in which positional information of the movable body is measured using an interferometer system and an encoder system, and the movable body is driven based on measurement information of the interferometer system and also the movable body is driven using measurement information of the encoder system so that a measurement error of the interferometer system is compensated.
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Accused Products
Abstract
First positional information of a stage is measured using an interferometer system, for example, an X interferometer and a Y interferometer. At the same time, second positional information of the stage is measured using an encoder system, for example, one X head and one Y head. A coordinate offset is set by performing a moving average of the difference between the first positional information and the second positional information for over a predetermined measurement time, and the reliability of output signals of the encoder system is verified using the coordinate offset. In the case the output signals are determined to be normal, the stage is servocontrolled using the sum of the first positional information and the coordinate offset. Such servocontrol by a hybrid method makes it possible to perform drive control of the stage having stability of the interferometer and accuracy of the encoder together.
99 Citations
33 Claims
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1. A movable body drive method of driving a movable body along a predetermined plane, the method comprising:
a drive process in which positional information of the movable body is measured using an interferometer system and an encoder system, and the movable body is driven based on measurement information of the interferometer system and also the movable body is driven using measurement information of the encoder system so that a measurement error of the interferometer system is compensated. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A pattern formation method of forming a predetermined pattern on an object held by a movable body, the method comprising:
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a drive process in which when the movable body is driven along a predetermined plane while measuring positional information of the movable body using an interferometer system and an encoder system, measurement information of the interferometer system is used as the positional information of the movable body; and a calibration process in which predetermined calibration processing to improve alignment accuracy of the pattern and the object is performed using measurement information of the encoder system. - View Dependent Claims (12, 13, 14, 15)
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16. A pattern formation method of transferring a pattern formed on a mask held by a first movable body onto an object held by a second movable body, the method comprising:
measuring positional information of one of the first movable body and the second movable body using an interferometer system and an encoder system, and driving the one of the movable bodies using measurement information of the interferometer system and also driving the other of the movable bodies using measurement information of a position measurement device that measures positional information of the other of the movable bodies and measurement information of the encoder system. - View Dependent Claims (17, 18)
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19. A movable body drive system that drives a movable body along a predetermined plane, the system comprising:
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an interferometer system that measures positional information of the movable body; an encoder system that measures positional information of the movable body; and a drive device that drives the movable body based on measurement information of the interferometer system, and also drives the movable body using measurement information of the encoder system so as to compensate a measurement error of the interferometer system. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27)
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28. A pattern formation apparatus that forms a predetermined pattern on an object held by a movable body;
- the apparatus comprising;
an interferometer system that measures positional information of the movable body; an encoder system that measures positional information of the movable body; and a processing device that, when the movable body is driven along a predetermined plane while measuring positional information of the movable body using the interferometer system and the encoder system, uses measurement information of the interferometer system as the positional information of the movable body, and also performs predetermined calibration processing to improve alignment accuracy of the pattern and the object using measurement information of the encoder system. - View Dependent Claims (29, 30, 31)
- the apparatus comprising;
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32. A pattern formation apparatus that transfers a pattern formed on a mask onto an object, the apparatus comprising;
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a first movable body that holds the mask; a second movable body that holds the object; an interferometer system and an encoder system that measure positional information of one of the first movable body and the second movable body; a position measurement device that measures positional information of the other of the first movable body and the second movable body; and a drive device that drives the one of the movable bodies using measurement information of the interferometer system and also drives the other of the movable bodies using measurement information of the position measurement device and the encoder system. - View Dependent Claims (33)
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Specification