Optical characteristic measuring apparatus and optical characteristic measuring method
First Claim
1. An optical characteristic measuring apparatus measuring optical characteristics of a measurement target, the optical characteristic measuring apparatus comprising:
- an optical system including first and second carrier retarders of which the retardations are known and differ from each other and first and second quarter-wave plates without wavelength dependence, the optical system causing light emitted from a light source to be incident on the measurement target through a first polarizer, the first carrier retarder, and the first quarter-wave plate and modulated by the measurement target, and causing the modulated light to be incident on light-receiving means through the second quarter-wave plate, the second carrier retarder, and a second polarizer; and
calculation means for performing a spectrum extraction process of extracting a spectral peak from a frequency spectrum obtained by analyzing a light intensity signal detected by the light-receiving means, and an optical characteristic element calculation process of calculating an optical characteristic element representing the optical characteristics of the measurement target based on the extracted spectral peak and the retardations of the first and second carrier retarders.
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Accused Products
Abstract
An optical characteristic measuring apparatus including a carrier retarder of which the retardation is known and a quarter-wave plate without wavelength dependence, wherein light emitted from a light source (light-emitting device) is incident on a measurement target through a first polarizer (polarizer), the carrier retarder, and the quarter-wave plate, and the light which has passed through the measurement target is incident on a photodetector through a second polarizer (analyzer). A spectral peak is extracted from a frequency spectrum obtained by analyzing a light intensity signal detected by the photodetector. The optical characteristic element of the measurement target is calculated based on the extracted spectral peak and the retardation of the carrier retarder.
13 Citations
25 Claims
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1. An optical characteristic measuring apparatus measuring optical characteristics of a measurement target, the optical characteristic measuring apparatus comprising:
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an optical system including first and second carrier retarders of which the retardations are known and differ from each other and first and second quarter-wave plates without wavelength dependence, the optical system causing light emitted from a light source to be incident on the measurement target through a first polarizer, the first carrier retarder, and the first quarter-wave plate and modulated by the measurement target, and causing the modulated light to be incident on light-receiving means through the second quarter-wave plate, the second carrier retarder, and a second polarizer; and calculation means for performing a spectrum extraction process of extracting a spectral peak from a frequency spectrum obtained by analyzing a light intensity signal detected by the light-receiving means, and an optical characteristic element calculation process of calculating an optical characteristic element representing the optical characteristics of the measurement target based on the extracted spectral peak and the retardations of the first and second carrier retarders. - View Dependent Claims (2, 3, 4, 5, 6, 17, 18, 19)
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7. An optical characteristic measuring apparatus measuring optical characteristics of a measurement target, the optical characteristic measuring apparatus comprising:
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an optical system including a carrier retarder of which the retardation is known and a quarter-wave plate without wavelength dependence, the optical system causing light emitted from a light source to be incident on the measurement target through a first polarizer, the carrier retarder, and the quarter-wave plate and modulated by the measurement target, and causing the modulated light to be incident on light-receiving means through a second polarizer; and calculation means performing a spectrum extraction process of extracting a spectral peak from a frequency spectrum obtained by analyzing a light intensity signal detected by the light-receiving means, and an optical characteristic element calculation process of calculating an optical characteristic element representing the optical characteristics of the measurement target based on the extracted spectral peak and the retardation of the carrier retarder. - View Dependent Claims (8, 9, 16)
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10. An optical characteristic measuring apparatus measuring optical characteristics of a measurement target, the optical characteristic measuring apparatus comprising:
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an optical system including a carrier retarder of which the retardation is known and a quarter-wave plate without wavelength dependence, the optical system causing light emitted from a light source to be incident on the measurement target through a first polarizer and modulated by the measurement target, and causing the modulated light to be incident on light-receiving means through the quarter-wave plate, the carrier retarder, and a second polarizer; and calculation means performing a spectrum extraction process of extracting a spectral peak from a frequency spectrum obtained by analyzing a light intensity signal detected by the light-receiving means, and an optical characteristic element calculation process of calculating an optical characteristic element representing the optical characteristics of the measurement target based on the extracted spectral peak and the retardation of the carrier retarder. - View Dependent Claims (11, 12)
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13. An optical characteristic measuring apparatus measuring optical characteristics of a measurement target, the optical characteristic measuring apparatus comprising:
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an optical system including a carrier retarder of which the retardation is known and a quarter-wave plate without wavelength dependence, the optical system causing light emitted from a light source to be incident on the measurement target through a polarizer, the carrier retarder, and the quarter-wave plate and modulated by the measurement target, and causing the modulated light to be incident on light-receiving means; and calculation means performing a spectrum extraction process of extracting a spectral peak from a frequency spectrum obtained by analyzing a light intensity signal detected by the light-receiving means, and an optical characteristic element calculation process of calculating an optical characteristic element representing the optical characteristics of the measurement target based on the extracted spectral peak and the retardation of the carrier retarder. - View Dependent Claims (14, 15)
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20. An optical characteristic measuring method for measuring optical characteristics of a measurement target, the optical characteristic measuring method comprising:
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a process of providing first and second carrier retarders of which the retardations are known and differ from each other and first and second quarter-wave plates without wavelength dependence, causing light emitted from a light source to be incident on the measurement target through a first polarizer, the first carrier retarder, and the first quarter-wave plate and modulated by the measurement target, and causing the modulated light to be incident on light-receiving means through the second quarter-wave plate, the second carrier retarder, and a second polarizer; a spectrum extraction process of extracting a spectral peak from a frequency spectrum obtained by analyzing a light intensity signal detected by the light-receiving means; and an optical characteristic element calculation process of calculating an optical characteristic element representing the optical characteristics of the measurement target based on the extracted spectral peak and the retardations of the first and second carrier retarders. - View Dependent Claims (24, 25)
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21. An optical characteristic measuring method for measuring optical characteristics of a measurement target, the optical characteristic measuring method comprising:
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a process of providing a carrier retarder of which the retardation is known and a quarter-wave plate without wavelength dependence, causing light emitted from a light source to be incident on the measurement target through a first polarizer, the carrier retarder, and the quarter-wave plate and modulated by the measurement target, and causing the modulated light to be incident on light-receiving means through a second polarizer; a spectrum extraction process of extracting a spectral peak from a frequency spectrum obtained by analyzing a light intensity signal detected by the light-receiving means; and an optical characteristic element calculation process of calculating an optical characteristic element representing the optical characteristics of the measurement target based on the extracted spectral peak and the retardation of the carrier retarder.
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22. An optical characteristic measuring method for measuring optical characteristics of a measurement target, the optical characteristic measuring method comprising:
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a process of providing a carrier retarder of which the retardation is known and a quarter-wave plate without wavelength dependence, causing light emitted from a light source to be incident on the measurement target through a first polarizer and modulated by the measurement target, and causing the modulated light to be incident on light-receiving means through the quarter-wave plate, the carrier retarder, and a second polarizer; a spectrum extraction process of extracting a spectral peak from a frequency spectrum obtained by analyzing a light intensity signal detected by the light-receiving means; and an optical characteristic element calculation process of calculating an optical characteristic element representing the optical characteristics of the measurement target based on the extracted spectral peak and the retardation of the carrier retarder.
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23. An optical characteristic measuring method for measuring optical characteristics of a measurement target, the optical characteristic measuring method comprising:
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a process of providing a carrier retarder of which the retardation is known and a quarter-wave plate without wavelength dependence, causing light emitted from a light source to be incident on the measurement target through a polarizer, the carrier retarder, and the quarter-wave plate and modulated by the measurement target, and causing the modulated light to be incident on light-receiving means; a spectrum extraction process of extracting a spectral peak from a frequency spectrum obtained by analyzing a light intensity signal detected by the light-receiving means; and an optical characteristic element calculation process of calculating an optical characteristic element representing the optical characteristics of the measurement target based on the extracted spectral peak and the retardation of the carrier retarder.
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Specification