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METHODS AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE IN A PROCESSING CHAMBER

  • US 20090035941A1
  • Filed: 07/31/2008
  • Published: 02/05/2009
  • Est. Priority Date: 08/01/2007
  • Status: Abandoned Application
First Claim
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1. An apparatus for manufacturing a semiconductor device, comprising:

  • a process chamber configured to perform a plurality of different processes on a substrate;

    a gas supply unit configured to supply at least one process gas to the process chamber;

    at least one upper electrode unit positioned at an upper portion of the process chamber;

    at least one lower electrode unit opposite the upper electrode unit and configured to support a substrate thereon;

    a driving member connected to at least one of the lower electrode unit and the upper electrode unit and configured to move the lower electrode unit and/or the upper electrode unit to control a distance between the upper and the lower electrode units; and

    a power supply unit configured to apply a first power to the upper electrode unit and to apply a second power to the lower electrode unit.

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