APPARATUS AND METHOD FOR PROCESSING SEMICONDUCTOR

• US 20090037699A1
• Filed: 10/13/2006
• Published: 02/05/2009
• Est. Priority Date: 10/14/2005
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Matsuzawa, Takahito
• Application Number:
  US12/089,309
• Publication Number:
  US 20090037699A1
• Time in Patent Office: Days
• US Class Current: 712/220
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: H01L 21/67294 using identification means, e.g. labels on substrates or labels on containers

Abstract

A semiconductor processing apparatus includes a tester for inspecting a semiconductor device, a display unit 25, a control unit 21, an IC tag reader 29 and an auxiliary storage unit 23 for storing an authority allowed to each operator. The control unit 21 reads an ID from an IC tag possessed by an operator approaching the IC tag reader 29. The control unit 21 refers to the auxiliary storage unit 23 and determines the authority of the operator based on the read ID. Further, the control unit 21 allows an instruction to be inputted within the determined authority range, and composes a manipulation screen allowing a processing status to be viewed, and displays the manipulation screen on the display unit 25. When the operator moves away from the apparatus and the ID cannot be read any longer, the control unit 21 turns on a screen saver to hide the display.

Claims

1. A semiconductor processing apparatus comprising:

a semiconductor processing unit;

a display unit including a display screen for displaying an image;

a display control unit for displaying, on the display unit, an instruction inputting screen for inputting an instruction for the semiconductor processing unit and/or a processing status display screen for displaying a processing status by the semiconductor processing unit;

an identification information reading unit for reading identification information, which is stored in a storage device possessed by an operator, in a non-contact manner; and

an authority storage unit for storing therein authority definition information defining an authority allowed to the operator,

wherein the display control unit includes an authority determination unit for determining the authority allowed to the operator, which is specified by the identification information read by the identification information reading unit, based on the authority definition information stored in the authority storage unit; and

a display restricting unit for generating and displaying, on the display unit, a manipulation screen, which enables the operator, within an authority range determined by the authority determination unit, to input the instruction for the semiconductor processing unit and/or to view the processing status by the semiconductor processing unit.

2. The semiconductor processing apparatus of claim 1, wherein the display control unit includes:

a screen saver display control unit for displaying a screen saver for concealing the manipulation screen; and

a screen saver canceling control unit for turning off the screen saver when the authority determination unit determines that the operator has the authority.

3. The semiconductor processing apparatus of claim 1, wherein the identification information reading unit includes an IC tag reader for reading the identification information stored on a non-contact type IC tag possessed by the operator.

4. The semiconductor processing apparatus of claim 1, wherein the semiconductor processing unit includes at least one of a processing unit for processing a base body and an inspecting unit for inspecting the base body processed by the processing unit.

5. The semiconductor processing apparatus of claim 1, wherein the authority storage unit includes:

a group authority storage unit for storing therein an authority for each group; and

a member information storage unit for storing therein member information indicating to which group each operator belongs.

6. The semiconductor processing apparatus of claim 5, further comprising:

a modification detecting unit for detecting a change in a human resources information file by referring to the human resources information file and generating modification information specifying the detected change; and

a member information updating unit for updating the member information stored in the member information storage unit based on the modification information generated by the modification detecting unit.

7. A method for displaying a processing status, comprising:

processing a semiconductor;

displaying a screen;

controlling a display in the displaying step by displaying an instruction inputting screen for inputting an instruction for the semiconductor processing step and/or a processing status display screen for displaying a processing status by the semiconductor processing step;

reading identification information, which is stored in a storage device possessed by an operator, in a non-contact manner;

storing authority definition information defining an authority allowed to the operator;

determining the authority allowed to the operator, which is specified by the identification information read in the identification information reading step, based on the authority definition information stored in the authority storing step; and

restricting the display in the displaying step by generating and displaying a manipulation screen, which enables the operator, within an authority range determined by the authority determination step, to input the instruction in the semiconductor processing step and/or to view the processing status in the semiconductor processing step.

8. The method of claim 7, wherein the display control step includes:

displaying a screen saver for concealing the manipulation screen; and

turning off the screen saver when it is determined in the authority determination step that the operator has the authority.

9. The method of claim 7, wherein in the identification information reading step, the identification information stored on a non-contact type IC tag possessed by the operator is read.

10. The method of claim 7, wherein the semiconductor processing step includes at least one of:

processing a base body; and

inspecting the base body processed in the processing step.

11. The method of claim 7, wherein the authority storing step includes:

storing an authority for each group; and

storing member information indicating to which group each operator belongs.

12. A semiconductor processing apparatus comprising:

a semiconductor processing means;

a display means including a display screen for displaying an image;

a display control means for displaying, on the display means, an instruction inputting screen for inputting an instruction for the semiconductor processing means and/or a processing status display screen for displaying a processing status by the semiconductor processing means;

an identification information reading means for reading identification information, which is stored in a storage device possessed by an operator, in a non-contact manner; and

an authority storage means for storing therein authority definition information defining an authority allowed to the operator,

wherein the display control means includes an authority determination means for determining the authority allowed to the operator, which is specified by the identification information read by the identification information reading means, based on the authority definition information stored in the authority storage means; and

a display restricting means for generating and displaying, on the display means, a manipulation screen, which enables the operator, within an authority range determined by the authority determination means, to input the instruction for the semiconductor processing means and/or to view the processing status by the semiconductor processing means.