Electrical Connections in Microelectromechanical Devices
First Claim
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1. A method of fabricating a micromirror device, comprising:
- depositing first and second sacrificial layers on a substrate;
forming a reflective mirror plate on one of the first or second sacrificial layers;
forming a deformable hinge on the other sacrificial layer, the hinge forming comprising;
forming the hinge that has a first hinge layer that is electrically insulating and a second hinge layer that is electrically conducting, wherein the first hinge layer is disposed between the second hinge layer and the reflective mirror plate; and
wherein the first hinge layer is patterned such that at least a portion of the second hinge layer is electrically connected to the reflective mirror plate; and
removing the first and second sacrificial layers so as to free the mirror plate.
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Abstract
A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.
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Citations
28 Claims
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1. A method of fabricating a micromirror device, comprising:
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depositing first and second sacrificial layers on a substrate; forming a reflective mirror plate on one of the first or second sacrificial layers; forming a deformable hinge on the other sacrificial layer, the hinge forming comprising; forming the hinge that has a first hinge layer that is electrically insulating and a second hinge layer that is electrically conducting, wherein the first hinge layer is disposed between the second hinge layer and the reflective mirror plate; and wherein the first hinge layer is patterned such that at least a portion of the second hinge layer is electrically connected to the reflective mirror plate; and removing the first and second sacrificial layers so as to free the mirror plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28-70. -70. (canceled)
Specification