ESD PROTECTION FOR MEMS DISPLAY PANELS
First Claim
Patent Images
1. A display device comprising:
- a microelectromechanical system (MEMS) display portion comprising a plurality of MEMS display elements, each MEMS display element connected to at least one of a plurality of control inputs; and
a plurality of MEMS switches, each MEMS switch being configured to selectively connect at least one of the control inputs to a first potential in response to said control input reaching a second potential.
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Abstract
A MEMS (Microelectromechanical system) device is described. The device includes an array of MEMS elements with addressing lines and MEMS switches configured to selectively connect the addressing lines to a ground or other potential in the event of an over-voltage, such as during an ESD event. The arrangement is particularly advantageous for protecting the array, because the MEMS switches can be formed using substantially the same processing steps which are used to form the array.
53 Citations
37 Claims
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1. A display device comprising:
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a microelectromechanical system (MEMS) display portion comprising a plurality of MEMS display elements, each MEMS display element connected to at least one of a plurality of control inputs; and a plurality of MEMS switches, each MEMS switch being configured to selectively connect at least one of the control inputs to a first potential in response to said control input reaching a second potential. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A display device comprising:
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means for displaying an image, the displaying means comprising a plurality of display elements, each display element connected to at least one of a plurality of control inputs; and a plurality of means for selectively connecting at least one of the control inputs to a first potential in response to said control input reaching a second potential. - View Dependent Claims (11, 12, 13, 14)
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- 15. A method of connecting one or more row or column electrodes of an array to a first potential, the method comprising closing a MEMS switch in response to a voltage on the row or column electrode, wherein the row or column electrode is connected to the first potential, the voltage exceeding a threshold voltage.
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20. A display device comprising:
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a display comprising a plurality of MEMS display elements, each MEMS display element connected to one of a plurality of row electrodes and one of a plurality of column electrodes; a plurality of MEMS switches, each MEMS switch connected to a first potential and to a row electrode or a column electrode, wherein each MEMS switch is configured to connect the first potential to the row or column electrode when a voltage on the row or column electrode exceeds a first threshold. - View Dependent Claims (21)
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22. A display device comprising:
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a MEMS display portion comprising a plurality of MEMS display elements, each MEMS display element having a first actuation threshold; a plurality of MEMS switches connected to the display portion, each MEMS switch having a second actuation threshold, wherein the second actuation threshold is higher than the first actuation threshold. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29)
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30. A display device comprising:
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means for displaying comprising a plurality of display elements, each display element having a first actuation threshold; and means for selectively connecting the displaying means to one or more electrodes, the connecting means comprising a plurality of connecting elements, each connecting element having a second actuation threshold, wherein the second actuation threshold is higher than the first actuation threshold. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37)
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Specification