Lithographic apparatus and device manufacturing method
First Claim
1. A method for generating a radiation for use in a lithographic apparatus, the method comprising:
- supplying a fuel to a discharge space located between a cathode and an anode;
creating a discharge between the cathode and the anode in the fuel to form a plasma; and
adjusting a volume defined by the plasma by controlling radiation emission by the plasma, the adjusting including supplying a substance to the plasma to control the radiation emission.
1 Assignment
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Accused Products
Abstract
A lithographic system includes a source configured to generate a radiation, the source including a cathode and an anode, the cathode and the anode configured to create a discharge in a fuel located in a discharge space so as to generate a plasma, the discharge space including, in use, a substance configured to adjust radiation emission by the plasma so as to control a volume defined by the plasma; a pattern support configured to hold a patterning device, the patterning device configured to pattern the radiation to form a patterned beam of radiation; a substrate support configured to support a substrate; and a projection system configured to project the patterned beam of radiation onto the substrate.
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Citations
43 Claims
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1. A method for generating a radiation for use in a lithographic apparatus, the method comprising:
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supplying a fuel to a discharge space located between a cathode and an anode; creating a discharge between the cathode and the anode in the fuel to form a plasma; and adjusting a volume defined by the plasma by controlling radiation emission by the plasma, the adjusting including supplying a substance to the plasma to control the radiation emission. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A device manufacturing method comprising:
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generating a beam of radiation, the generating including supplying a fuel to a discharge space located between a cathode and an anode; creating a discharge between the cathode and the anode in the fuel to form a plasma; and adjusting a volume defined by the plasma by controlling radiation emission by the plasma, the adjusting including supplying a substance to the plasma to control the radiation emission; patterning the beam of radiation to form a patterned beam of radiation; and projecting the patterned beam of radiation onto a substrate. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A source configured to generate a radiation for a lithographic apparatus, the source comprising:
a cathode and an anode, the cathode and the anode configured to create a discharge in a fuel located in a discharge space so as to generate a plasma, the discharge space including, in use, a substance configured to adjust radiation emission by the plasma so as to control a volume defined by the plasma. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A lithographic system comprising:
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a source configured to generate a radiation, the source comprising a cathode and an anode, the cathode and the anode configured to create a discharge in a fuel located in a discharge space so as to generate a plasma, the discharge space including, in use, a substance configured to adjust radiation emission by the plasma so as to control a volume defined by the plasma; a pattern support configured to hold a patterning device, the patterning device configured to pattern the radiation to form a patterned beam of radiation; a substrate support configured to support a substrate; and a projection system configured to project the patterned beam of radiation onto the substrate. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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Specification