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METHODS FOR GENERATING A STANDARD REFERENCE DIE FOR USE IN A DIE TO STANDARD REFERENCE DIE INSPECTION AND METHODS FOR INSPECTING A WAFER

  • US 20090041332A1
  • Filed: 07/18/2008
  • Published: 02/12/2009
  • Est. Priority Date: 07/20/2007
  • Status: Active Grant
First Claim
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1. A computer-implemented method for generating a standard reference die for use in a die to standard reference die inspection, comprising:

  • acquiring output of an inspection system for a centrally located die on a wafer and one or more dies located on the wafer;

    combining the output for the centrally located die and the one or more dies based on within die positions of the output; and

    generating the standard reference die based on results of said combining.

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