Method and apparatus for treating fluids to reduce microbubbles
First Claim
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1. An apparatus comprising:
- an exchange device with one or more gas trapping surface features;
a housing for said exchange device, said housing having a liquid inlet and a liquid outlet;
a liquid treated by the exchange device in contact with the surface features of the exchange device;
said contact reduces amount of microbubbles in the liquid from said surface features of the exchange device to a lower amount than in the absence of said contact of the liquid with surface features of the exchange device.
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Abstract
Versions of the invention include methods for reducing microbubbles in liquids treated by heat or mass exchange devices. The exchange devices may be conditioned by having gases in crevices and surfaces displaced by a liquid. The methods can be used to prepare liquids with reduced numbers of microbubbles.
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Citations
30 Claims
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1. An apparatus comprising:
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an exchange device with one or more gas trapping surface features; a housing for said exchange device, said housing having a liquid inlet and a liquid outlet; a liquid treated by the exchange device in contact with the surface features of the exchange device;
said contact reduces amount of microbubbles in the liquid from said surface features of the exchange device to a lower amount than in the absence of said contact of the liquid with surface features of the exchange device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method comprising:
contacting one or more surface features of an exchange device with a liquid, said contacting lowers the number of microbubble particle counts in the liquid from the surface features to a lower number than in the absence of said contacting of the liquid with surface features of the exchange device. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method comprising:
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contacting one or more surface features of a porous membrane in a housing with a liquid used to treat a wafer, said contacting lowers the number of heterogeneously formed microbubble particle counts from the surface features of the porous membrane in the liquid to a lower number than in the absence of said contacting of the liquid with the surface features of the porous membrane; and filtering the liquid. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification