EXPOSURE METHOD, EXPOSURE APPARATUS AND DEVICE FABRICATING METHODS
First Claim
1. An exposure method for exposing a substrate by forming a liquid immersion region on the substrate by use of a liquid immersion mechanism and irradiating the substrate with exposure light through liquid of the liquid immersion region, comprising:
- forming a liquid immersion region on a measuring member by use of the liquid immersion mechanism and performing measurement by receiving measurement light through liquid of the liquid immersion region, in order to determine an exposure condition of the substrate; and
exposing the substrate by taking into account a difference between a pressure of the liquid in the process of measurement and that in the process of exposure and a result of the measurement thus performed.
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Accused Products
Abstract
A liquid immersion region (LR) is formed on a measuring member (65) by use of the liquid immersion mechanism (1), and measurement is performed by receiving measurement light through liquid (LQ) which forms the liquid immersion region (LR), in order to determine an exposure condition of a substrate (P). The substrate (P) is exposed by taking into account a difference between a pressure of the liquid (LQ) in the process of measurement and that in the process of exposure and a result of the measurement thus performed.
28 Citations
19 Claims
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1. An exposure method for exposing a substrate by forming a liquid immersion region on the substrate by use of a liquid immersion mechanism and irradiating the substrate with exposure light through liquid of the liquid immersion region, comprising:
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forming a liquid immersion region on a measuring member by use of the liquid immersion mechanism and performing measurement by receiving measurement light through liquid of the liquid immersion region, in order to determine an exposure condition of the substrate; and exposing the substrate by taking into account a difference between a pressure of the liquid in the process of measurement and that in the process of exposure and a result of the measurement thus performed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An exposure apparatus for exposing a substrate by forming a liquid immersion region on the substrate and irradiating the substrate with exposure light through liquid in the liquid immersion region, comprising:
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a liquid immersion mechanism that forms a liquid immersion region on an object; a measuring device that performs measurement to determine an exposure condition of the substrate, the measuring device having a measuring member, the measuring device adapted to receive measurement light through liquid in the liquid immersion region formed on the measuring member by use of the liquid immersion mechanism; and an exposure control unit that forms the liquid immersion region on the substrate by use of the liquid immersion mechanism and exposes the substrate in consideration of a measurement result obtained by the measuring device and a difference between a pressure of the liquid in the process of measurement and that in the process of exposure. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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Specification