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SIMULATION METHOD AND SIMULATION PROGRAM

  • US 20090048813A1
  • Filed: 08/15/2008
  • Published: 02/19/2009
  • Est. Priority Date: 08/16/2007
  • Status: Abandoned Application
First Claim
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1. A simulation method configured to simulate a feature profile of a material surface, the simulation method comprising:

  • using an algorithm of repeating a step of calculating a surface growth rate and a step of skipping the calculation of the surface growth rate,the surface growth rate being calculated in the step of skipping the calculation of the algorithm if the material surface traverses a material interface.

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