SIMULATION METHOD AND SIMULATION PROGRAM
First Claim
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1. A simulation method configured to simulate a feature profile of a material surface, the simulation method comprising:
- using an algorithm of repeating a step of calculating a surface growth rate and a step of skipping the calculation of the surface growth rate,the surface growth rate being calculated in the step of skipping the calculation of the algorithm if the material surface traverses a material interface.
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Abstract
A simulation method is configured to simulate a feature profile of a material surface. The simulation method includes using an algorithm of repeating a step of calculating a surface growth rate and a step of skipping the calculation of the surface growth rate. The surface growth rate is calculated in the step of skipping the calculation of the algorithm if the material surface traverses a material interface.
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Citations
20 Claims
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1. A simulation method configured to simulate a feature profile of a material surface, the simulation method comprising:
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using an algorithm of repeating a step of calculating a surface growth rate and a step of skipping the calculation of the surface growth rate, the surface growth rate being calculated in the step of skipping the calculation of the algorithm if the material surface traverses a material interface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A simulation program configured to cause a computer to simulate a feature profile of a material surface, the program causing the computer to perform:
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using an algorithm of repeating a step of calculating a surface growth rate and a step of skipping the calculation of the surface growth rate, the surface growth rate being calculated in the step of skipping the calculation of the algorithm if the material surface traverses a material interface. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification