Passive Solid State Ionizing Radiation Sensor
First Claim
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1. A radiation sensor formed on a single die, comprising in combination:
- a radiation hardened die; and
a radiation sensitive area formed in the radiation hardened die, wherein a property of the radiation sensitive area changes when exposed to ionizing radiation, and wherein circuitry in a radiation hardened area of the radiation hardened die detects the property change.
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Abstract
A radiation sensor and a method for making the radiation sensor are described. An ionizing radiation sensitive area is formed in a radiation insensitive or hardened die. When the sensitive area is impacted by ionizing radiation, properties of the sensitive area change. For example, the changed property may be charge density, threshold voltage, leakage current, and/or resistance. Circuitry for measuring these property changes is located in a radiation hardened area of the die. As a result, a radiation sensor may be fabricated on a single die.
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Citations
20 Claims
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1. A radiation sensor formed on a single die, comprising in combination:
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a radiation hardened die; and a radiation sensitive area formed in the radiation hardened die, wherein a property of the radiation sensitive area changes when exposed to ionizing radiation, and wherein circuitry in a radiation hardened area of the radiation hardened die detects the property change. - View Dependent Claims (2, 3, 4, 5)
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6. A method for fabricating a radiation sensor on a single die, comprising:
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providing a radiation hardened die; forming a radiation sensitive area in the radiation hardened die, wherein a property of the radiation sensitive area changes when exposed to ionizing radiation; and forming circuitry in a radiation hardened area of the radiation hardened die operable to detect the property change. - View Dependent Claims (7, 8, 9, 10, 11, 12)
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13. A method for fabricating a radiation sensor on a single die, comprising:
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providing a radiation insensitive die; implanting ions in a portion of the radiation insensitive die forming an sensitive area in the radiation insensitive die; and forming circuitry in the radiation insensitive die operable to detect a property change in the sensitive area when exposed to radiation. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification