Passive Solid State Ionizing Radiation Sensor

• US 20090050814A1
• Filed: 08/20/2007
• Published: 02/26/2009
• Est. Priority Date: 08/20/2007
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Seefeldt, James D., Kriz, Jeffrey J.
• Granted Patent: US 7,718,963 B2
• Time in Patent Office: Days
• US Class Current: 250/370.70
• CPC Class Codes: G01T 1/026 Semiconductor dose-rate meters
• CPC Class Codes: H01L 31/117 of the bulk effect radiation detector type, e.g. Ge-Li compensated PIN gamma-ray detectors

Abstract

A radiation sensor and a method for making the radiation sensor are described. An ionizing radiation sensitive area is formed in a radiation insensitive or hardened die. When the sensitive area is impacted by ionizing radiation, properties of the sensitive area change. For example, the changed property may be charge density, threshold voltage, leakage current, and/or resistance. Circuitry for measuring these property changes is located in a radiation hardened area of the die. As a result, a radiation sensor may be fabricated on a single die.

Claims

1. A radiation sensor formed on a single die, comprising in combination:

a radiation hardened die; and

a radiation sensitive area formed in the radiation hardened die, wherein a property of the radiation sensitive area changes when exposed to ionizing radiation, and wherein circuitry in a radiation hardened area of the radiation hardened die detects the property change.

2. The radiation sensor of claim 1, wherein the property of the radiation sensitive area that changes when exposed to the ionizing radiation is selected from the group consisting of charge density, threshold voltage, leakage current, and resistance.

3. The radiation sensor of claim 1, wherein the circuitry provides an output related to total ionizing dose.

4. The radiation sensor of claim 1, wherein the circuitry in the radiation hardened area includes circuitry for transmitting the detected property change to a device remote from the die.

5. The radiation sensor of claim 1, wherein the circuitry in the radiation hardened area includes a data storage device.

6. A method for fabricating a radiation sensor on a single die, comprising:

providing a radiation hardened die;

forming a radiation sensitive area in the radiation hardened die, wherein a property of the radiation sensitive area changes when exposed to ionizing radiation; and

forming circuitry in a radiation hardened area of the radiation hardened die operable to detect the property change.

7. The method of claim 6, wherein forming a radiation sensitive area in the radiation hardened die includes damaging interconnect oxide by means of a masked implantation.

8. The method of claim 6, wherein forming a radiation sensitive area in the radiation hardened die includes electric field induced damage by means of a parallel plate capacitor in a metal stack.

9. The method of claim 6, wherein forming a radiation sensitive area in the radiation hardened die includes deposition of an ionizing radiation sensitive material on a die.

10. The method of claim 6, wherein forming a radiation sensitive area in the radiation hardened die includes deposition and etch of an ionizing radiation sensitive material on a die.

11. The method of claim 6, wherein forming a radiation sensitive area in the radiation hardened die includes assembly of an ionizing radiation sensitive material with the radiation hardened die using wafer to wafer bonding methods.

12. The method of claim 6, wherein forming a radiation sensitive area in the radiation hardened die includes assembly of an ionizing radiation sensitive material with the radiation hardened die using fluid fabrication methods.

13. A method for fabricating a radiation sensor on a single die, comprising:

providing a radiation insensitive die;

implanting ions in a portion of the radiation insensitive die forming an sensitive area in the radiation insensitive die; and

forming circuitry in the radiation insensitive die operable to detect a property change in the sensitive area when exposed to radiation.

14. The method of claim 13, wherein a photoresist is used to implant the ions in the portion of the radiation insensitive die.

15. The method of claim 13, wherein the ion implantation causes a parasitic transistor to form in the sensitive area.

16. The method of claim 15, wherein the parasitic transistor causes threshold voltage to reduce as charge increases in the sensitive area, wherein the circuitry detects changes in the threshold voltage.

17. The method of claim 15, wherein the parasitic transistor causes leakage current to increase as charge increases in the sensitive area, wherein the circuitry detects changes in the leakage current.

18. The method of claim 13, wherein the ion implantation causes damage to an oxide layer under a device layer in the sensitive area.

19. The method of claim 18, wherein the damaged oxide layer cause a change in resistance as charge increases in the sensitive area, wherein the circuitry detects the change in resistance.

20. The method of claim 13, further consisting of forming circuitry operable to transmit the detected property change to a device remote from the radiation insensitive die.