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THERMOCOUPLE

  • US 20090052498A1
  • Filed: 08/19/2008
  • Published: 02/26/2009
  • Est. Priority Date: 08/24/2007
  • Status: Abandoned Application
First Claim
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1. A temperature control system for controlling a temperature within a chemical vapor deposition reactor comprising:

  • at least one heating element;

    at least one temperature sensor for providing a temperature measurement within said reactor, said temperature sensor comprising;

    a sheath having a measuring tip;

    a support tube at least partially disposed within said sheath;

    a first wire and a second wire disposed within said support tube, said first and second wires formed of different metals;

    a junction formed between an end of both of said first and second wires, said junction being located adjacent to a distal end of said support tube; and

    a spring disposed about a portion of said support tube, said spring exerting a minimum spring force on said support tube to bias said junction into contact with said measuring tip to provide continuous contact between said junction and said measuring tip without causing deformation of said junction; and

    a temperature controller operatively connected to said at least one heating element and said at least one temperature sensor to control said temperature within said reactor.

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