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METHOD OF RECYCLING ABRASIVE SLURRY

  • US 20090053981A1
  • Filed: 08/15/2008
  • Published: 02/26/2009
  • Est. Priority Date: 08/23/2007
  • Status: Abandoned Application
First Claim
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1. A method of recycling an abrasive slurry for recycling a slurry containing colloidal silica, the slurry being a used slurry having been used in polishing semiconductor wafer(s), the method comprising:

  • adding a dispersant to the used slurry having been collected so as to prevent the used slurry from being gelled;

    irradiating ultrasound to the used slurry having been added with the dispersant so as to disperse a gelled portion and aggregated silica in the used slurry; and

    removing a foreign substance contained in the used slurry having been irradiated with the ultrasound, the foreign substance being removed by a filter.

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