SENSOR FOR HUMIDITY
First Claim
1. A sensor for humidity provided with a moisture sensitive film formed with polymer in which a hydrophilic group binds through at least one hydrophobic group to other hydrophilic groups, wherein said hydrophobic group consists of multi-membered ring, wherein the glass transition temperature of said polymer is in the range of 240°
- C. to 500°
C. and wherein said polymer includes at least any one of unit structures, represented by formula below.
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Abstract
The present invention provides a sensor for humidity which is optimized as moisture sensitive material in basic properties such as long term stability and the like at the range of high temperature. The sensor for moisture according to the present invention is provided with a moisture sensitive film formed with polymer in which a hydrophilic group binds through at least one hydrophobic group to other hydrophilic groups. Basic properties of the sensor such as long term stability and the like is optimized by forming a moisture sensitive element provided with a moisture sensitive film formed with polymer in which the glass transition temperature is in the range of 240° C. to 500° C.
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Citations
12 Claims
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1. A sensor for humidity provided with a moisture sensitive film formed with polymer in which a hydrophilic group binds through at least one hydrophobic group to other hydrophilic groups, wherein said hydrophobic group consists of multi-membered ring, wherein the glass transition temperature of said polymer is in the range of 240°
- C. to 500°
C. and wherein said polymer includes at least any one of unit structures, represented by formula below.
- C. to 500°
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2-5. -5. (canceled)
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6. A semiconductor device provided with a moisture sensitive film formed with polymer in which a hydrophilic group binds through at least one hydrophobic group to other hydrophilic groups, wherein said hydrophobic group consists of multi-membered ring, wherein the glass transition temperature of said polymer is in the -range of 240t to 500°
- C. and wherein said polymer includes at least any one of unit structures represented by formula below.
- View Dependent Claims (11, 12)
- C. and wherein said polymer includes at least any one of unit structures represented by formula below.
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7-10. -10. (canceled)
Specification
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- Resources
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Current AssigneeToplas Engineering Co., Ltd.
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Original AssigneeToplas Engineering Co., Ltd.
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InventorsSuzuki, Kazuhiro
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Application NumberUS12/281,956Publication NumberTime in Patent OfficeDaysField of SearchUS Class Current73/335.20CPC Class CodesG01N 27/223 for determining moisture co...
