INSPECTION APPARATUS AND INSPECTION METHOD USING ELECTROMAGNETIC WAVE
First Claim
1. An inspection apparatus for performing an inspection using a terahertz wave, comprising:
- an electromagnetic wave generation and irradiation unit which generates a terahertz wave and irradiates the terahertz wave on an inspection object; and
an electromagnetic wave detection unit having a plurality of detection units, wherein the plurality of detection units is arranged so as to detect the terahertz wave which is irradiated by the electromagnetic wave generation and irradiation unit and is transmitted or reflected with interacting with different sites of an inspection object, and is constructed so as to detect the terahertz wave from the different sites in different detection time or detection frequencies respectively to acquire terahertz wave response information from the inspection object based on detection signals from the plurality of detection units.
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Abstract
The present invention is to provide inspection apparatus and method of being able to acquire electromagnetic wave response information of an inspection object at high speed as average information using an electromagnetic wave. An inspection apparatus using an electromagnetic wave 2 includes an electromagnetic wave generation and irradiation unit 9 which generates an electromagnetic wave and irradiates the electromagnetic wave on an inspection object 11, and an electromagnetic wave detection unit 10 having a plurality of detection units. The plurality of detection units is arranged so as to detect the electromagnetic wave which is irradiated by the electromagnetic wave generation and irradiation unit and is transmitted or reflected with interacting with different sites of the inspection object 11, and is constructed so as to detect the electromagnetic wave from the different sites in different detection time or detection frequencies respectively. The inspection apparatus acquires electromagnetic wave response information on the inspection object 11 based on detection signals from the plurality of detection units.
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Citations
12 Claims
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1. An inspection apparatus for performing an inspection using a terahertz wave, comprising:
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an electromagnetic wave generation and irradiation unit which generates a terahertz wave and irradiates the terahertz wave on an inspection object; and an electromagnetic wave detection unit having a plurality of detection units, wherein the plurality of detection units is arranged so as to detect the terahertz wave which is irradiated by the electromagnetic wave generation and irradiation unit and is transmitted or reflected with interacting with different sites of an inspection object, and is constructed so as to detect the terahertz wave from the different sites in different detection time or detection frequencies respectively to acquire terahertz wave response information from the inspection object based on detection signals from the plurality of detection units. - View Dependent Claims (2, 3, 4, 5)
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6. An inspection method for performing an inspection using a terahertz wave, comprising:
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a step of generating a terahertz wave and irradiating the terahertz wave on different sites of an inspection object; a step of detecting the terahertz wave, which is transmitted or reflected with interacting with different sites of an inspection object, by a plurality of detection units in different detection time or detection frequencies, respectively; and a step of acquiring terahertz wave response information from the inspection object based on detection signals from the plurality of detection units. - View Dependent Claims (7, 8, 9, 10)
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11. An inspection apparatus for performing an inspection using a terahertz wave, comprising:
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a plurality of generation units for generating a terahertz wave; and a detection unit for detecting the terahertz wave which is generated by the generation unit and is transmitted or reflected by the inspection object, wherein the plurality of detection units is arranged so as to detect the transmitted or reflected terahertz wave with different delay time respectively, and a time waveform of the transmitted or reflected terahertz wave is acquired using the information regarding the terahertz wave which the plurality of detection units detect. - View Dependent Claims (12)
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Specification