Microfluidic Pump and Valve Structures and Fabrication Methods
First Claim
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1. A method for making an active microfluidic device including at least one planar substrate and a deformable membrane, comprising the steps of:
- deforming at least a portion of the membrane out of the plane of the substrate.contacting the non-deformed portion of the membrane and a bonding surface of the substrate; and
applying a bonding agent to an interface between the substrate and the non-deformed portion of the membrane to be attached thereto;
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Abstract
Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.
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Citations
19 Claims
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1. A method for making an active microfluidic device including at least one planar substrate and a deformable membrane, comprising the steps of:
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deforming at least a portion of the membrane out of the plane of the substrate. contacting the non-deformed portion of the membrane and a bonding surface of the substrate; and applying a bonding agent to an interface between the substrate and the non-deformed portion of the membrane to be attached thereto; - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method for making an active microfluidic device including at least one planar substrate and a deformable membrane, comprising, in recited order, the steps of:
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applying a curable bonding agent to the interface between the substrate and the membrane; contacting the membrane and the bonding surface of the substrate; deforming at least a portion of the membrane out of the plane of the substrate; and setting the bonding agent.
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18. A method for making an active microfluidic device including at least one planar substrate and a deformable membrane, comprising, in recited order, the steps of:
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contacting the membrane and the bonding surface of the substrate; applying a curable bonding agent to the interface between the substrate and the membrane; deforming at least a portion of the membrane out of the plane of the substrate; and curing the bonding agent.
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19. A method for making an active microfluidic device including at least one planar substrate and a deformable membrane, comprising, in recited order, the steps of:
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contacting the membrane and the bonding surface of the substrate; deforming at least a portion of the membrane; and applying the bonding agent to the interface between the substrate and the membrane.
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Specification