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Inductively-Coupled RF Power Source

  • US 20090058304A1
  • Filed: 11/06/2008
  • Published: 03/05/2009
  • Est. Priority Date: 11/21/2005
  • Status: Active Grant
First Claim
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1. A system for implementing a power source, comprising:

  • a power amplifier that generates a radio-frequency power signal with an adjustable operating frequency, said power amplifier also generating a reference phase signal derived from said radio-frequency power signal;

    an impedance match that provides said radio-frequency power signal to a plasma coil that has a variable resonance condition;

    a phase probe positioned adjacent to said plasma coil to generate a coil phase signal corresponding to said adjustable operating frequency; and

    a phase-locked loop device that generates a drive signal to said power amplifier to control said adjustable operating frequency, said drive signal being based upon a phase relationship between said reference phase signal and said coil phase signal, said adjustable operating frequency then tracking said variable resonance condition.

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