METHOD OF AND SYSTEM FOR FUNCTIONALLY TESTING MULTIPLE DEVICES IN PARALLEL IN A BURN-IN-ENVIRONMENT
First Claim
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1. A method of testing semiconductor devices, said method comprising:
- simultaneously heating a plurality of devices to a burn-in temperature;
producing a set of device functional test input signals;
producing a test select signal;
producing a voltage control signal;
multiplexing said set of device functional test input signals to selected ones of said devices selected according to said test select signal at said burn-in temperature;
applying said set of device functional test input signals to said selected ones of said devices at a test voltage according to said voltage control signal;
receiving device functional test output signals from said selected ones of said devices at said burn-in temperature; and
,demultiplexing device functional test output signals received from said selected ones of said devices at said burn-in temperature.
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Abstract
A method of and a system for testing semiconductor devices heat a plurality of devices to a burn-in temperature, and perform functional tests in parallel on the plurality of devices at the burn-in temperature. Systems include a burn-in oven and a test multiplexer. The burn-in oven is adapted to receive and heat the devices to the burn-in temperature. The test multiplexer is adapted to apply functional test signals to and receive output signals from the devices in the burn-in oven.
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Citations
19 Claims
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1. A method of testing semiconductor devices, said method comprising:
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simultaneously heating a plurality of devices to a burn-in temperature; producing a set of device functional test input signals; producing a test select signal; producing a voltage control signal; multiplexing said set of device functional test input signals to selected ones of said devices selected according to said test select signal at said burn-in temperature; applying said set of device functional test input signals to said selected ones of said devices at a test voltage according to said voltage control signal; receiving device functional test output signals from said selected ones of said devices at said burn-in temperature; and
,demultiplexing device functional test output signals received from said selected ones of said devices at said burn-in temperature. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A semiconductor device testing system, which comprises:
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a burn-in oven adapted to receive a plurality of devices; a flexible service processor, said flexible service processor being configured to generate device test input signals and receive device test output signals, said flexible service processor being further configured to generate test select signals and voltage control signals; a test multiplexer connected to receive device test signals from said flexible service processor and supply device test output signals to said flexible service processor, said test multiplexer being configured to multiplex said device test signals to selected devices in said burn-in oven under control of said test select signals at selected voltages under control of said voltage control signals, said test multiplexer being further configured to receive device test output signals from said devices and selectively provide device test output signals from selected devices under control of said test select signals. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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Specification