MOVABLE BODY DRIVE METHOD AND MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD
First Claim
1. A movable body drive method in which a movable body is driven substantially along a two-dimensional plane, the method comprising:
- a first process in which a position in a direction perpendicular to the two-dimensional plane and a tilt with respect to the two-dimensional plane of the movable body is measured using a detection device that has a plurality of detection positions and has a plurality of sensor heads which detect positional information of a surface of the movable body substantially parallel to the two-dimensional plane in the direction perpendicular to the two-dimensional plane with a reference plane parallel to the two-dimensional plane serving as a reference; and
a second process in which a set of sensor heads used to control the position and attitude of the movable body is switched to another set of sensor heads which include at least one sensor head different from the set of sensor heads so that the position in the direction perpendicular to the two-dimensional plane and the tilt with respect to the two-dimensional plane of the movable body are continuous before and after the switching.
1 Assignment
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Accused Products
Abstract
A controller uses two Z heads, which are positioned above a reflection surface installed on the ±X ends of the upper surf ace of a table, to measure the height and tilt of the table. According to the XY position of the table, the Z heads to be used are switched from ZsR and ZsL to ZsR′ and ZsL. On the switching of the heads, the controller applies a coordinate linkage method to set an initial value of the Z heads which are to be newly used. Accordingly, although the Z heads to be used are sequentially switched according the XY position of the table, measurement results of the height and the tilt of the table are stored before and after the switching, and it becomes possible to drive the table with high precision.
92 Citations
24 Claims
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1. A movable body drive method in which a movable body is driven substantially along a two-dimensional plane, the method comprising:
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a first process in which a position in a direction perpendicular to the two-dimensional plane and a tilt with respect to the two-dimensional plane of the movable body is measured using a detection device that has a plurality of detection positions and has a plurality of sensor heads which detect positional information of a surface of the movable body substantially parallel to the two-dimensional plane in the direction perpendicular to the two-dimensional plane with a reference plane parallel to the two-dimensional plane serving as a reference; and a second process in which a set of sensor heads used to control the position and attitude of the movable body is switched to another set of sensor heads which include at least one sensor head different from the set of sensor heads so that the position in the direction perpendicular to the two-dimensional plane and the tilt with respect to the two-dimensional plane of the movable body are continuous before and after the switching. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A movable body drive system in which a movable body is driven along a substantially two-dimensional planer the system comprising
a detection device that has a plurality of detection positions, and has a plurality of sensor heads which detect positional information of a surface of the movable body substantially parallel to the two-dimensional plane at each detection point, in a direction perpendicular to the two-dimensional plane with a reference plane parallel to the two-dimensional plane serving as a reference; - and
a controller which measures a position in the direct-Lon perpendicular to the two-dimensional plane and a tilt with respect to the two dimensional plane of the movable body, based on the output of the plurality of sensor heads of the detection device, and also switches a set of sensor heads used to control the position and attitude of the movable body from the set of sensor heads to another set of sensor heads including at least one different sensor head from the set of sensor heads so that the position in the direction perpendicular to the two-dimensional plane and the tilt with respect to the two-dimensional plane of the movable body becomes successive before and after the switching, during the movement of the movable body. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A movable body drive method in which a movable body is driven substantially along a two-dimensional plane, the method comprising:
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detecting a position of the movable body in a direction perpendicular to the two-dimensional plane with a first sensor of a plurality of sensors placed within an operating area of the movable body, and controlling at least one of the position in the perpendicular direction and a tilt with respect to the two-dimensional plane of the movable body, and also obtaining correction information to correct the detection results by a second sensor using tilt information of the movable body with respect to the two-dimensional plane obtained from detection results by the first sensor, when starting a control using detection results by the second sensor different from the first sensor of the plurality of sensors, according to a movement of the two-dimensional plane of the movable body.
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24. A movable body drive method to drive a movable body at least in a two-dimensional plane, wherein
positional information of the movable body in a direction perpendicular to the two-dimensional plane is detected by at least one of a plurality of sensors having different detection points within the two-dimensional plane, and on detecting positional information of the movable body with the one sensor and a different sensor, detection information and tilt information of the movable body with respect to the two-dimensional plane of the one sensor are used, according to a movement of the movable body.
Specification