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ELECTROMAGNETIC ANALYSIS APPARATUS

  • US 20090059226A1
  • Filed: 08/21/2008
  • Published: 03/05/2009
  • Est. Priority Date: 08/31/2007
  • Status: Active Grant
First Claim
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1. An analysis apparatus for analyzing a specimen, comprising:

  • a spectral separator for dispersing spatially an electromagnetic wave introduced from the specimen into spectral components;

    a sensing element array containing plural sensing elements for sensing the spectral components of the electromagnetic wave dispersed spatially by the spectral separator; and

    a spectrum calculator for calculating the spectrum from the signal sensed by the sensing elements;

    the sensing element array having sensitivities different to each of the spectral components of the electromagnetic wave dispersed spatially by the spectral separator; and

    the spectral separator and the sensing element array being placed so as to receive the spectral components by each of the sensing elements at different incident angles.

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