ELECTROMAGNETIC ANALYSIS APPARATUS
First Claim
1. An analysis apparatus for analyzing a specimen, comprising:
- a spectral separator for dispersing spatially an electromagnetic wave introduced from the specimen into spectral components;
a sensing element array containing plural sensing elements for sensing the spectral components of the electromagnetic wave dispersed spatially by the spectral separator; and
a spectrum calculator for calculating the spectrum from the signal sensed by the sensing elements;
the sensing element array having sensitivities different to each of the spectral components of the electromagnetic wave dispersed spatially by the spectral separator; and
the spectral separator and the sensing element array being placed so as to receive the spectral components by each of the sensing elements at different incident angles.
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Abstract
An analysis apparatus for analyzing a specimen comprises a spectral separator for dispersing spatially an electromagnetic wave introduced from the specimen into spectral components, a sensing element array containing plural sensing elements for sensing the spectral components of the electromagnetic wave dispersed spatially by the spectral separator, and a spectrum calculator for calculating the spectrum from the signal sensed by the sensing elements; the sensing element array having sensitivities different to each of the spectral components of the electromagnetic wave dispersed spatially by the spectral separator, and the spectral separator and the sensing element array being placed so as to receive the spectral components by each of the sensing elements at different incident angles.
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Citations
11 Claims
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1. An analysis apparatus for analyzing a specimen, comprising:
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a spectral separator for dispersing spatially an electromagnetic wave introduced from the specimen into spectral components; a sensing element array containing plural sensing elements for sensing the spectral components of the electromagnetic wave dispersed spatially by the spectral separator; and a spectrum calculator for calculating the spectrum from the signal sensed by the sensing elements; the sensing element array having sensitivities different to each of the spectral components of the electromagnetic wave dispersed spatially by the spectral separator; and the spectral separator and the sensing element array being placed so as to receive the spectral components by each of the sensing elements at different incident angles. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An analysis apparatus for analyzing a specimen, comprising:
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a generator for generating an electromagnetic wave; a diffraction grating for dispersing spatially an electromagnetic wave generated by the generator into spectral components; a sensing element array having a plurality of plasmon type sensing elements for sensing the spectral components of the electromagnetic wave dispersed spatially by the diffraction grating; and a spectrum calculator for calculating the spectra from the intensity of the electromagnetic wave detected by the sensing elements; the sensing element array being constituted to maximize a sensitivity for detecting each of the spectral components of the electromagnetic wave separated spatially by the diffraction grating; and the diffraction grating and the sensing element array being placed so as to introduce the spatially dispersed spectral components to each of the sensing elements at an incident angle to maximize the sensitivity of each of the sensing elements.
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Specification