Laser circuit etching by subtractive deposition
First Claim
Patent Images
1. A method of depositing metal structures, said method comprising the steps of:
- providing a coated sheet, said coated sheet having a first side that comprises a dielectric substrate and a second side that comprises a metal;
providing a target structure; and
controlling a laser to generate a laser beam toward said first side of said coated sheet such that said laser beam passes through said first side, ablates portions of said second side, and deposits circuit structures on said target structure.
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Abstract
In one embodiment the present invention includes a direct-write laser lithography system. The system includes a reel-to-reel feed system that presents the clear film-side of a single-sided metal-clad tape to a laser for direct patterning of the metal. The laser beam is swept laterally across the tape by a moving mirror, and is intense enough to ablate the metal but not so strong as to destroy the tape substrate. The ablated metal becomes deposited to form circuit structures on a target structure.
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Citations
14 Claims
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1. A method of depositing metal structures, said method comprising the steps of:
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providing a coated sheet, said coated sheet having a first side that comprises a dielectric substrate and a second side that comprises a metal; providing a target structure; and controlling a laser to generate a laser beam toward said first side of said coated sheet such that said laser beam passes through said first side, ablates portions of said second side, and deposits circuit structures on said target structure. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An apparatus including a flexible circuit etching system, said flexible circuit etching system comprising:
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a reel-to-reel tape system that linearly presents a coated tape, wherein said coated tape has a first side that comprises a dielectric substrate and a second side that comprises a metal; a laser that generates a laser beam having a power sufficient to ablate said metal from said second side of said coated tape; and a mirror that controllably moves to direct said laser beam toward said first side of said coated tape such that said laser beam passes through said first side, ablates portions of said second side, and deposits circuit structures on a target structure. - View Dependent Claims (9)
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10. An apparatus including a laser ablation machine for patterning metal onto a target, said laser ablation machine comprising:
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a laser; and a patterning control system that positions said laser in relation to a coated sheet, wherein said coated sheet has a first side that comprises a dielectric substrate and a second side that comprises a metal, wherein said laser generates a laser beam having a power sufficient to ablate said metal from said second side of said coated sheet, and wherein said laser beam passes through said first side, ablates portions of said second side, and deposits circuit structures on a target structure. - View Dependent Claims (11)
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12. An apparatus including an electrical circuit, said electrical circuit produced by a method comprising the steps of:
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providing a coated sheet, said coated sheet having a first side that comprises a dielectric substrate and a second side that comprises a metal; providing a target structure; and controlling a laser to generate a laser beam toward said first side of said coated sheet such that said laser beam passes through said first side, ablates portions of said second side, and deposits said portions having been ablated to form said electrical circuit on said target structure. - View Dependent Claims (13, 14)
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Specification