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MICRO-NOZZLE, NANO-NOZZLE, MANUFACTURING METHODS THEREFOR, APPLICATIONS THEREFOR

  • US 20090065471A1
  • Filed: 02/10/2004
  • Published: 03/12/2009
  • Est. Priority Date: 02/10/2003
  • Status: Abandoned Application
First Claim
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1. A nozzle structure comprising:

  • a monolithic body having an array of nozzles, the nozzles having sectional openings having heights of about 100 nm or less,the nozzles associated with a well structure.

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