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TEST-KEY FOR CHECKING INTERCONNECT AND CORRESPONDING CHECKING METHOD

  • US 20090065775A1
  • Filed: 11/18/2008
  • Published: 03/12/2009
  • Est. Priority Date: 08/29/2005
  • Status: Active Grant
First Claim
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1. A test key for checking an interconnect structure, comprising:

  • a contiguous metal line; and

    a plurality of conductive plugs on the contiguous metal line, wherein one end of each conductive plug contacts with the contiguous metal line, and the other end of at least one conductive plug is not connected to any conductor.

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