METHODS AND APPARATUS FOR DETECTING DEFECTS IN INTERCONNECT STRUCTURES
First Claim
1. A method of detecting a void in a test structure comprising:
- a) measuring a resistance of the test structure;
b) applying a stress to the test structure at increasing levels until at least one of;
i) the measured resistance of the test structure exceeds a predetermined resistance threshold; and
ii) the stress level reaches a predetermined stress maximum;
c) detecting a void if the measured resistance of the test structure exceeds the predetermined resistance threshold; and
d) determining that the test structure is void free if the stress level reaches the predetermined stress maximum without the measured resistance of the test structure exceeding the predetermined resistance threshold.
1 Assignment
0 Petitions
Accused Products
Abstract
In some aspects, a method is provided for detecting a void in a test structure that comprises (a) measuring a resistance of the test structure; (b) applying a stress to the test structure at increasing levels until at least one of: (i) the measured resistance of the test structure exceeds a predetermined resistance threshold; and (ii) the stress level reaches a predetermined stress maximum; (c) detecting a void if the measured resistance of the test structure exceeds the predetermined resistance threshold; and (d) determining that the test structure is void free if the stress level reaches the predetermined stress maximum without the measured resistance of the test structure exceeding the predetermined resistance threshold. Numerous other aspects are provided.
13 Citations
14 Claims
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1. A method of detecting a void in a test structure comprising:
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a) measuring a resistance of the test structure; b) applying a stress to the test structure at increasing levels until at least one of; i) the measured resistance of the test structure exceeds a predetermined resistance threshold; and ii) the stress level reaches a predetermined stress maximum; c) detecting a void if the measured resistance of the test structure exceeds the predetermined resistance threshold; and d) determining that the test structure is void free if the stress level reaches the predetermined stress maximum without the measured resistance of the test structure exceeding the predetermined resistance threshold. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A system for detecting a void in a test structure comprising:
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a measurement device adapted to measure a resistance of the test structure; a stressing mechanism adapted to apply a stress to the test structure at increasing levels; and a control unit coupled to the measurement device and the stressing mechanism, the control unit adapted to; i) determine at least one of whether the measured resistance of the test structure exceeds a predetermined resistance threshold and the stress level has reached a predetermined stress maximum; ii) detect the presence of a void if the measured resistance of the test structure exceeds the predetermined resistance threshold; and iii) determine that the test structure is void-free if the stress level applied to the test structure reaches the predetermined stress maximum without the measured resistance of the test structure exceeding the predetermined resistance threshold. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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Specification